云南化工2025,Vol.52Issue(6):38-42,5.DOI:10.3969/j.issn.1004-275X.2025.06.09
Aspen Plus在改良西门子法多晶硅工艺中的研究进展
Research Progress of Aspen Plus in Improving Siemens Polycrystalline Silicon Process
摘要
Abstract
Against the backdrop of sustained growth in global energy and technology demand,the optimization of production processes for poly-crystalline silicon,as the core material of photovoltaic cells and semiconductor industries,is crucial.At present,the improved Siemens method has become the main technology for polycrystalline silicon manufacturing.This article focuses on the application progress of Aspen Plus in this process.Through simulation studies on reaction systems,separation processes,and process innovations,the impact of process parameters on the quality,yield,and energy consumption of polycrystalline silicon products was analyzed in depth.During the SiHCl reduction process,it was found that low pressure,appropriate hydrogen gas ratio,and the addition of SiH2Cl2 can optimize the reaction;In the separation process,parame-ter optimization of distillation,absorption and other operations significantly improves the purity of raw materials and reduces energy consumption.The application effect of the new boron removal process and partition wall tower is significant.This study provides strong theoretical and practi-cal support for the improvement of polycrystalline silicon production processes and sustainable development,which helps to promote the develop-ment of the polycrystalline silicon industry in the fields of clean energy and semiconductors.关键词
Aspen Plus/多晶硅工艺/改良西门子法/工艺优化/节能减排Key words
Aspen Plus/Polycrystalline Silicon Process/Improved Siemens Method/Process Optimization/Conserve Energy/Reduce Emissions分类
化学化工引用本文复制引用
张世玲,陈燕红,谢磊磊,邓菁..Aspen Plus在改良西门子法多晶硅工艺中的研究进展[J].云南化工,2025,52(6):38-42,5.基金项目
云南省教育厅科学研究基金项目(2024J1369). (2024J1369)