测试科学与仪器2025，Vol.16Issue(2)：272-279,8.DOI:10.62756/jmsi.1674-8042.2025026
反馈波导狭缝光栅微环谐振器的传感特性
Sensing characteristics of feedback waveguide slot grating microring resonators
摘要
Abstract
To enhance the quality factor and sensitivity of refractive index sensors,a feedback waveguide slot grating micro-ring resonator was proposed.An air-hole grating structure was introduced based on the slot micro-ring,utilizing the reflection of the grating to achieve the electromagnetic-like induced transparency effect at different wavelengths.The high slope characteristics of the EIT-like effect enabled a higher quality factor and sensitivity.The transmission principle of the structure was analyzed using the transmission matrix method,and the transmission spectrum and mode field distribution were simulated using the finite-difference time-domain(FDTD)method,and the device structure parameters were adjusted for optimization.Simulation results show that the proposed structure achieves an EIT-like effect with a quality factor of 59 267.5.In the analysis of refractive index sensing characteristics,the structure exhibits a sensitivity of 408.57 nm/RIU and a detection limit of 6.23×10-5 RIU.Therefore,the proposed structure achieved both a high quality factor and refractive index sensitivity,demonstrating excellent sensing performance for applications in environmental monitoring,biomedical fields,and other areas with broad market potential.关键词
集成光学/微环谐振器/狭缝微环/光栅/折射率传感器:硅基波导Key words
integrated optics/micro-ring resonator/slot micro-ring/grating/refractive index sensor/silicon waveguide引用本文复制引用
朱彦杰,梁龙学,刘春娟..反馈波导狭缝光栅微环谐振器的传感特性[J].测试科学与仪器,2025,16(2):272-279,8.基金项目
This work was supported by Natural Science Foundation of Gansu Province(NO.21JR7RA289) （NO.21JR7RA289）
