电子学报2025，Vol.53Issue(3)：790-799,10.DOI:10.12263/DZXB.20240975
集成柔性撑鼻器的双通路可穿戴MEMS呼吸监测微系统
Dual-Channel Wearable MEMS Respiratory Monitoring Microsystem Integrated with Flexible Nasal Support Device
摘要
Abstract
Breathing,as a crucial physiological process for sustaining life,is closely related to various respiratory dis-eases such as sleep apnea and asthma.To meet the increasing demand for health monitoring,this paper innovatively propos-es a dual-channel wearable MEMS(Micro-Electro-Mechanical Systems)respiratory monitoring microsystem integrated with a flexible nasal expander.This microsystem incorporates a flexible nasal expander,a respiratory sensor,and a signal processing module,enabling continuous real-time monitoring of airflow within the nasal cavity.The sensor's sensitive ele-ment adopts a folded metal resistor structure,deposited on a glass substrate through planar MEMS technology,utilizing the thermoresistive effect to achieve signal measurement.When embedded in the flexible nasal expander,the sensor can simul-taneously monitor breathing signals from both sides of the nasal cavity,making it especially suitable for long-term continu-ous monitoring.Signal simulation and performance testing results demonstrate that the sensor exhibits excellent sensitivity,response speed,and anti-interference capability.In tests simulating respiratory conditions such as sleep apnea and asthma,the sensor accurately differentiates between normal and abnormal breathing patterns,supporting further analysis of various respiratory diseases.Based on this,the paper develops a dual-channel wearable MEMS respiratory monitoring device inte-grated with a flexible nasal expander,aimed at continuous,real-time,and long-term respiratory monitoring,particularly suit-able for abnormal breathing screening and health monitoring during sleep.Additionally,this system captures changes in the nasal cycle,providing new data dimensions for in-depth analysis of breathing patterns and physiological rhythms,highlight-ing its potential application value in long-term health management.关键词
呼吸监测/微机电系统/可穿戴设备/热阻效应/呼吸疾病/呼吸传感器Key words
respiratory monitoring/micro-electro-mechanical systems/wearable devices/thermoresistive effect/re-spiratory diseases/respiratory sensor分类
电子信息工程引用本文复制引用
赵文浒,王嘉祥,胡致远,苏开明,李铁,杨卓青..集成柔性撑鼻器的双通路可穿戴MEMS呼吸监测微系统[J].电子学报,2025,53(3):790-799,10.基金项目
国家重点研发计划(No.2020YFB2008503) （No.2020YFB2008503）
国家自然科学基金(No.61974088) National Key Research and Development Program of China(No.2020YFB2008503) （No.61974088）
National Natural Science Foundation of China(No.61974088) （No.61974088）
