电子学报2025，Vol.53Issue(3)：811-820,10.DOI:10.12263/DZXB.20240624
栅压可调谐的本征SnO2乙醇传感器
Gate Voltage Tunable Ethanol Sensor Based on Pristine SnO2
摘要
Abstract
It is crucial to monitor ethanol in real time due to the safety risks posed by its high volatility and flamma-bility.However,current methods for improving the performance of SnO2 ethanol sensors often hinder the miniaturization of devices.To address this,the paper designs an intrinsic SnO2 ethanol sensor with a field-effect transistor structure and em-ploys magnetron sputtering to fabricate the sensitive film.The study systematically investigates the influence of gate volt-age on the gas-sensing performance of the sensor.Experimental results indicate that the SnO2 sensor prepared by sputtering is an n-channel depletion-mode device.Gas-sensing tests reveal significant differences in the sensor's response under differ-ent operating gate voltages:at a gate voltage of 10 V,the current change of the sensor in 100 ppm ethanol is 2.40 times;while at a gate voltage of-30 V,the channel current change is significantly enhanced to 3.42 times,representing a 42%im-provement compared to 10 V.Further investigation shows that the gas-sensing properties of SnO2 arise from the modulation of carrier concentration in the channel by the surface adsorption of ethanol molecules.This effect is significantly enhanced under negative gate voltage but suppressed under positive gate voltage.However,a positive gate voltage of 10 V induces more electrons in the channel,effectively accelerating the adsorption and desorption processes of ethanol.As a result,the sensor's response and recovery times to 100 ppm ethanol are reduced to 8 s and 17 s,respectively,demonstrating faster dy-namic characteristics.The study's findings indicate that the degree and rate of ethanol vapor reaction on the SnO2 surface are significantly regulated by the sensor's gate voltage.This research provides a new approach for optimizing the gas-sens-ing performance of SnO2 sensors and contributes to advancing their application in miniaturized,fast-response,and high-pre-cision gas-sensing detection.关键词
本征SnO2/场效应管/栅压可调谐/乙醇传感器Key words
pristine SnO2/filed effect transistor/gate voltage tunable/ethanol sensor分类
信息技术与安全科学引用本文复制引用
吴海洋,余宁梅..栅压可调谐的本征SnO2乙醇传感器[J].电子学报,2025,53(3):811-820,10.基金项目
国家自然科学基金(No.62404179) （No.62404179）
陕西省教育厅专项科研计划项目(No.23JK0568) （No.23JK0568）
陕西省自然科学基础研究计划项目(No.2024JC-YBQN-0667) National Natural Science Foundation of China(No.62404179) （No.2024JC-YBQN-0667）
Scientific Research Plan Proj-ects of Shaanxi Education Department(No.23JK0568) （No.23JK0568）
Natural Science Basic Research Program of Shaanxi Province(No.2024JC-YBQN-0667) （No.2024JC-YBQN-0667）
