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Development platform for UV-NIL processes using polymer masters produced by laser ablation and photolithography

Joachim Zajadacz Pierre Lorenz Martin Ehrhardt Klaus Zimmer

Nanotechnology and Precision Engineering2025，Vol.8Issue(2)：P.32-41,10.

Nanotechnology and Precision Engineering2025，Vol.8Issue(2)：P.32-41,10.DOI:10.1063/10.0034395

Development platform for UV-NIL processes using polymer masters produced by laser ablation and photolithography

Joachim Zajadacz ¹Pierre Lorenz ¹Martin Ehrhardt ¹Klaus Zimmer¹

作者信息

1. Leibniz Institute of Surface Engineering(IOM),Permoserstr.15,Leipzig 04318,Germany
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摘要

关键词

Laser ablation/Polymer master/Replication/UV nanoimprint/Photolithography/Assembled master

分类

化学化工

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Joachim Zajadacz,Pierre Lorenz,Martin Ehrhardt,Klaus Zimmer..Development platform for UV-NIL processes using polymer masters produced by laser ablation and photolithography[J].Nanotechnology and Precision Engineering,2025,8(2):P.32-41,10.

Nanotechnology and Precision Engineering

ISSN：1672-6030

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