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Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modeling

Yanding Qin Jie Yuan Yunpeng Zhang Hui Tang Jianda Han

Nanotechnology and Precision Engineering2025，Vol.8Issue(2)：P.1-12,12.

Nanotechnology and Precision Engineering2025，Vol.8Issue(2)：P.1-12,12.DOI:10.1063/10.0030477

Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modeling

Yanding Qin ¹Jie Yuan ²Yunpeng Zhang ¹Hui Tang ³Jianda Han¹

作者信息

1. Shenzhen Research Institute of Nankai University,Shenzhen 518083,China College of Artificial Intelligence,Nankai University,Tianjin 300350,China
2. Shenzhen Research Institute of Nankai University,Shenzhen 518083,China College of Artificial Intelligence,Nankai University,Tianjin 300350,China State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China
3. State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China
折叠

摘要

关键词

Flexure-based mechanism/Micro-vision-aided measurement/Hysteresis compensation/Decoupling control

分类

信息技术与安全科学

引用本文复制引用

Yanding Qin,Jie Yuan,Yunpeng Zhang,Hui Tang,Jianda Han..Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modeling[J].Nanotechnology and Precision Engineering,2025,8(2):P.1-12,12.

基金项目

supported in part by the Open Fund of State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology(Grant No.JMDZ2021007) （Grant No.JMDZ2021007）

in part by the Guangdong International Cooperation Program of Science and Technology(Grant No.2022A0505050078). （Grant No.2022A0505050078）

Nanotechnology and Precision Engineering

ISSN：1672-6030

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