计量学报2025，Vol.46Issue(6)：813-822,10.DOI:10.3969/j.issn.1000-1158.2025.06.05
X射线三维尺寸测量机台阶球板标准器的研制及应用
Development and Application of Step Ball-plate Standard for X-ray Three-dimensional Size Measuring Machine
摘要
Abstract
Aiming at the problems of space limitation and measurement stability of traditional standard for X-ray three-dimensional size measuring machine,the development and calibration method of step ball-plate standard were studied.Firstly,the base model of the standard was designed by model simulation combined with response surface optimization.Based on the clustering algorithm and GUI interface,the spatial distribution model of the standard was established,and the step ball-plate standard for three-dimensional size measurement was developed.Secondly,the F25 micro-nano coordinate measuring machine was used to trace the value of the standard,and the uncertainty under the value of 100 mm was better than 1.5 μm.Finally,the indication calibration of X-ray three-dimensional size measuring machine(METROTOM 1500)was completed through measurement experiments.For the measurement results,the GUM method,Monte Carlo method and consistency factor were used to evaluate the uncertainty and verify the traceability results.The results showed that the uncertainty of the measured X-ray three-dimensional size measuring machine is U(lsd)=(0.83+0.03L)μm,k=2,and the consistency index EN<1.关键词
几何量计量/尺寸校准/X射线三维尺寸测量机/量值传递/溯源/不确定度评定/台阶球板标准器Key words
geometrical metrology/size calibration/X-ray three-dimensional size measuring machine/quantity transfer/traceability/uncertainty assessment/step ball-plate standard分类
通用工业技术引用本文复制引用
谭浩晨,胡佳成,施玉书,皮磊,宋金城,杜德渝..X射线三维尺寸测量机台阶球板标准器的研制及应用[J].计量学报,2025,46(6):813-822,10.基金项目
国家重点研发计划(2022YFF0706400) （2022YFF0706400）
