机械科学与技术2025，Vol.44Issue(7)：1188-1199,12.DOI:10.13433/j.cnki.1003-8728.20230248
滚珠丝杠副精密运动平台全行程定位精度预测及补偿
Full-stroke Positioning Accuracy Prediction and Compensation of Ball-screw Pair Precision Motion Platform
摘要
Abstract
Positioning accuracy is a key index to measure the motion accuracy of precision moving platform.In this paper,by analyzing the error sources of the ball-screw pair of high precision moving platform,revealing the law of positioning accuracy transmission,establishing the error model of the lead error,and taking a kind of ball screw pair as the main research object,this paper proposed the prediction and compensation method of full-stroke positioning error of precision moving platform under macro(10 mm),small(1 mm)and micro(0.1 mm)stroke scales.Firstly,the mechanical characteristics of the ball screw pair of precision movement platform were analyzed,and the error source information was extracted.Secondly,the formation characteristics of the ball screw installation error,assembly error and lead error were analyzed respectively.Meanwhile,the information of each error item was decoupled,the comprehensive positioning error model of the precision movement platform was established with the ball screw pair as the object.Finally,based on the ball screw pair positioning error model,the mechanism of positioning error of precision motion platform under macro,small and micro strokes was analyzed,and the mapping law of ball screw pair error parameters and positioning error of precision motion platform under different strokes was revealed.Thus,the full-stroke positioning accuracy prediction and compensation method was proposed.The experimental results show that,according to the error model,positioning errors of 20 mm,2 mm and 0.2 mm stroke precision motion platform were compensated respectively.The results decreased from 13.7 μm,7.9 μm and 4.6 μm to 2.0 μm,1.5 μm and 1.0 μm respectively,which shows the positioning accuracy was improved obviously.关键词
精密运动平台/全行程定位精度/滚珠丝杠副/误差预测/误差补偿Key words
precision motion platform/full-stroke positioning accuracy/ball-screw pair/error prediction/error compensation分类
机械制造引用本文复制引用
唐勉志,唐皓..滚珠丝杠副精密运动平台全行程定位精度预测及补偿[J].机械科学与技术,2025,44(7):1188-1199,12.基金项目
国家自然科学基金项目(51705149)与湖南省教育厅优秀青年基金项目(20B212) （51705149）
