集成技术2025，Vol.14Issue(4)：131-142,12.DOI:10.12146/j.issn.2095-3135.20241201004
不同还原气氛烧结钛酸钡基陶瓷的性能研究
Study on the Properties of BaTiO3-Based Ceramics Sintered in Different Reducing Atmospheres
摘要
Abstract
The internal electrode materials of multilayer ceramic capacitors are gradually being replaced by base metals such as nickel,instead of precious metals.To ensure the excellent performance of the base metal internal electrode materials,the sintering process should be conducted in a reducing atmosphere.In this study,barium titanate-based ceramics samples were prepared by the solid-state method under different reducing atmospheres.The microstructure and properties of the samples were characterized using X-ray diffraction,field emission scanning electron microscope,Raman spectroscopy,and X-ray photoelectron spectroscopy.The effects of reducing atmosphere on the dielectric properties and reliability was systematically investigated.The study found that the polarization mechanism affects the dielectric properties and reliability of barium titanate-based ceramics.Specifically,With the increase of the volume fraction of H2 in N2(φ(H2))in reducing atmosphere,the polarization mechanism transitions from short-range hopping polarization of defect charge carriers to long-range migration polarization,thus affecting the dielectric constant,dielectric loss,and insulation resistivity.The results showed that S2 exhibited a higher dielectric constant,lower dielectric loss,better insulation properties,and overall superior performance.Furthermore,barium titanate-based multilayer ceramic capacitors with thickness of 0.9 μm and the temperature coefficients of capacitance of X6S was successfully fabricated.This work provides theoretical and technical guidance for improving the dielectric properties and reliability of base metal electrode multilayer ceramic capacitors.关键词
还原气氛/锰掺杂/介电性能/可靠性Key words
reducing atmosphere/Mn doping/dielectric properties/reliability分类
化学化工引用本文复制引用
许周怡,张凡,张蕾,于杰,曹秀华,付振晓,孙蓉..不同还原气氛烧结钛酸钡基陶瓷的性能研究[J].集成技术,2025,14(4):131-142,12.基金项目
国家重点研发计划项目(2022YFB380740) （2022YFB380740）
国家自然科学基金项目(51802142) （51802142）
广东省自然科学基金项目(2022A1515012604) （2022A1515012604）
新型电子元器件关键材料与工艺国家重点实验室项目(FHR-JS-202011012) （FHR-JS-202011012）
先进电子元器件联合创新中心项目(FHR-JS-202103001) This work is supported by National Key Research and Development Program of China(2022YFB380740) （FHR-JS-202103001）
National Natural Science Foundation of China(51802142) （51802142）
Natural Science Foundation of Guangdong Province(2022A1515012604) （2022A1515012604）
State Key Laboratory of Key Materials and Processes for New Electronic Components(FHR-JS-202011012) （FHR-JS-202011012）
and Joint Innovation Centre for Advanced Electronic Components(FHR-JS-202103001) （FHR-JS-202103001）
