强激光与粒子束2025，Vol.37Issue(7)：6-12,7.DOI:10.11884/HPLPB202537.240413
基于光腔衰荡大口径取样光学元件性能测试与缺陷分析
Performance characterization and defect analysis of large-aperture sampling optics based on cavity ring-down method
周文超 1邓婷 1彭琛 1曹玉龙 1魏蔚 1刘斯靓 1王静2
作者信息
- 1. 中国工程物理研究院应用电子学研究所,四川 绵阳 621900||先进激光与高功率微波全国重点实验室,四川 绵阳 621900
- 2. 电子科技大学光电科学与工程学院,成都 610054
- 折叠
摘要
Abstract
In high-energy laser systems,the performance parameters of large-aperture sampling optics determine the accuracy of beam testing and evaluation,as well as the precision of overall system performance control.This paper focuses on the performance testing requirements of sampling optics with high-reflectivity(HR)on the front surface and anti-reflectivity(AR)on the back surface.Utilizing the cavity-ring-down(CRD)-based reflectivity uniformity testing of large-aperture sampling optics,the reflectivity distribution,optical loss,and high-resolution scanning imaging of defects of sampling optics are obtained by scanning measuring the incident light from both the reflective film surface and the anti-reflective film surface,respectively.Furthermore,by comparing and analyzing the defect distribution maps,the classification of defects in the reflective film,transmissive film,and substrate of the sampling optics is achieved.Finally,by establishing a dual channel CRD system,the residual reflectance distribution of anti-reflective film and the types of defects in the transmissive film were obtained.The testing and analysis method proposed in this paper provides a systematic and comprehensive characterization tool for the performance evaluation and defect analysis of sampling optics.关键词
取样光学元件/大口径/光腔衰荡/高反膜/增透膜/缺陷状态Key words
sampling optics/large-aperture/cavity ring-down/highly reflective coating/anti-reflective coating/defect status分类
信息技术与安全科学引用本文复制引用
周文超,邓婷,彭琛,曹玉龙,魏蔚,刘斯靓,王静..基于光腔衰荡大口径取样光学元件性能测试与缺陷分析[J].强激光与粒子束,2025,37(7):6-12,7.
