真空电子技术Issue(3)：41-44,62,5.DOI:10.16540/j.cnki.cn11-2485/tn.2025.03.07
微型溅射离子泵金属-陶瓷封接强度及可靠性分析
Strength and Reliability Analysis of Metal-Ceramic Sealing for Miniature Sputtering Ion Pumps
高畅 1张小青 1杜英华 1付豪 1杨永亮 1陈芹1
作者信息
- 1. 北京真空电子技术研究所 微波电真空器件国家级重点实验室,北京 100015
- 折叠
摘要
Abstract
Based on ANSYS software,the sealing stress of ceramic sealable leading wire for miniature sput-tering ion pump is calculated to solve the problem of ceramic cracking along the sealing edge in welding process.The results of finite element analysis show that the maximum stress of the ceramic exceeds the material tensile strength,and the cracking location of the ceramic obtained by simulation is consistent with the actual cracking lo-cation.By optimizing the structure of the metal-ceramic sealing parts,the sealing stress is reduced and the ceramic cracking problem is solved.The improved pumps pass three thermal cycle tests,indicating they have good sealing strength and can meet the requirements of air tightness and voltage resistance.The miniature sputtering ion pumps can be used in traveling wave tubes to maintain internal vacuum.关键词
微型溅射离子泵/封接应力/可靠性Key words
Miniature sputtering ion pump/Sealing stress/Reliability分类
矿业与冶金引用本文复制引用
高畅,张小青,杜英华,付豪,杨永亮,陈芹..微型溅射离子泵金属-陶瓷封接强度及可靠性分析[J].真空电子技术,2025,(3):41-44,62,5.
