真空电子技术Issue(3)：45-51,7.DOI:10.16540/j.cnki.cn11-2485/tn.2025.03.08
零部件级释气率程控测试系统的研制与应用
Development and Application of a Programmable Outgassing Rate Testing System for Components and Parts
唐榕 1平宇 1卢少波 1韩永超1
作者信息
- 1. 北京真空电子科技有限公司,北京 100015
- 折叠
摘要
Abstract
The development idea and method of an outgassing rate testing system for components and parts are elaborated.Based on the orifice conductance method,and from the perspective of program control,the system integrates PLC and upper computer software to achieve fully automatic test procedure.The system can automati-cally generate testing reports.At the same time,it also has a fully automatic calibration process to maximize the accuracy of test data.The system automatically controls the start-stop of the vacuum system through PLC pro-gram,obtaining the vacuum testing environment.Through the communication of upper computer software and quadrupole mass spectrometer(QMS),data is collected from QMS and then is analyzed.The cooperation of up-per computer software and PLC program ensures the automatic operation of calibration and testing.关键词
真空设备/自动化/释气率测试/校准Key words
Vacuum equipment/Automation/Outgassing rate testing/Calibration分类
信息技术与安全科学引用本文复制引用
唐榕,平宇,卢少波,韩永超..零部件级释气率程控测试系统的研制与应用[J].真空电子技术,2025,(3):45-51,7.
