半导体学报（英文版）2025，Vol.46Issue(8)：53-58,6.DOI:10.1088/1674-4926/24120027
A semiconductor radiation dosimeter fabricated in 8-inch process
A semiconductor radiation dosimeter fabricated in 8-inch process
Jun Huang 1Yaxin Liu 1Ziyi Zeng 1Ning Ning 1Lulu Peng 1Bojin Pan 1Hang bao 1Qiuyue Huo 1Renxiong Li 1Qi Ding 1Yutuo Guo 1Yu Wang 1Kunqin He1
作者信息
- 1. United Microelectronics Center Co.,Ltd,Chongqing 401332,China
- 折叠
摘要
关键词
RADFET/PMOS/thick gate oxide/total dose effect/radiation detectionKey words
RADFET/PMOS/thick gate oxide/total dose effect/radiation detection引用本文复制引用
Jun Huang,Yaxin Liu,Ziyi Zeng,Ning Ning,Lulu Peng,Bojin Pan,Hang bao,Qiuyue Huo,Renxiong Li,Qi Ding,Yutuo Guo,Yu Wang,Kunqin He..A semiconductor radiation dosimeter fabricated in 8-inch process[J].半导体学报（英文版）,2025,46(8):53-58,6.
