分析化学2025，Vol.53Issue(7)：1064-1071,8.DOI:10.19756/j.issn.0253-3820.251073
气相色谱柱和氦放电离子化检测器单片集成气相色谱芯片的研制
A Monolithic Integrated Gas Chromatography Chip with Gas Chromatographic Column and Helium Discharge Ionization Detector
摘要
Abstract
A monolithic integrated gas chromatography chip,consisting of a micro gas chromatography column(μGCC)and a micro helium discharge ionization detector(μHDID)was proposed.The chip was fabricated using micro electromechanical system(MEMS)technique,and its sensitivity was improved from two aspects.On one hand,open tubular column was selected as the separation device,and the auxiliary helium channel width of μHDID was modulated based on the microchannel width of the μGCC to match the flow rates of μHDID and μGCC.On the other hand,the electrode structure inside the μHDID collection zone was optimized,a bias electrode group around the collection electrode was constructed,and the ion collection efficiency was improved.After coating HKUST-1 as the stationary phase,the monolithic integrated gas chromatography chip could achieve baseline separation and detection of light hydrocarbon gas mixture(methane,ethane,propane,andn-butane),with a detection limit for propane as low as 25 pg.The chip could carried out test under temperature-programmed conditions,with a resolution of 9.24 for ethane and propane.关键词
单片集成/微型气相色谱柱/微型氦放电离子化检测器/HKUST-1固定相/微机电系统Key words
Monolithic integration/Micro gas chromatography column/Micro helium discharge ionization detector/HKUST-1 stationary phase/Micro electromechanical system引用本文复制引用
祝雨晨,马少杰,李文博,李之睿,赵斌,冯飞..气相色谱柱和氦放电离子化检测器单片集成气相色谱芯片的研制[J].分析化学,2025,53(7):1064-1071,8.基金项目
国家重点研发计划项目(No.2021YFC2800301)、中国科学院战略性先导科技专项(C类)项目(No.XDC0250103)和上海东方英才计划项目(No.E5390101)资助. Supported by the National Key R&D Program of China(No.2021YFC2800301),the Strategic Priority Research Program of the Chinese Academy of Sciences(No.XDC0250103)and the Shanghai Oriental Talent Program(No.E5390101). （No.2021YFC2800301）
