分析化学2025，Vol.53Issue(7)：1072-1081,10.DOI:10.19756/j.issn.0253-3820.251055
飞行时间二次离子质谱仪中低场离子提取系统的研制
Development of A Low Field Ion Extraction System for Time-of-Flight Secondary Ion Mass Spectrometry
摘要
Abstract
Time-of-flight secondary ion mass spectrometer(TOF-SIMS)is a highly sensitive surface analysis instrument with high spatial resolution.Traditional TOF-SIMS instruments for sample targets use high field extraction methods.Although the ion collection efficiency is high,it is prone to issues such as low-energy ion beam defocusing,sample morphology sensitivity,and organic molecule ion dissociation.This study aimed to develope an efficient low-field ion extraction system suitable for TOF-SIMS with a continuous beam source.The SIMION simulation software was used to construct a model of the secondary ion optical extraction system.The key factors affecting the extraction efficiency were studied,and the structural parameters of the extraction cone were optimized.Using an indium target as the sample,an experimental test of the performance of the ion extraction system was carried out on the TOF-SIMS instrument.The influences of the voltages of the ion extraction cone and the single lens on the ion extraction efficiency were consistent with the simulation results.By adopting the technology of deflection and coaxial dynamic compensation,the imaging field of view of the ion extraction system was increased to 500 μm×500 μm.The energy window of the ion extraction system reached 10 eV,and the large imaging depth of field of 400 μm was achieved.In the test of a 5 mg/L cholesterol thin film sample,the signal-to-noise ratio of the characteristic peak[M-OH]+reached 4453.The results showed that this low-field secondary ion extraction system effectively improved the performance of the continuous beam TOF-SIMS instrument.关键词
飞行时间二次离子质谱/二次离子提取系统/仿真优化/提取效率Key words
Time-of-flight secondary ion mass spectrometry/Secondary ion extraction system/Simulation optimization/Extraction efficiency引用本文复制引用
王德泽,吴称心,陈懿,杜福新,花磊,李海洋,王建华,陈平..飞行时间二次离子质谱仪中低场离子提取系统的研制[J].分析化学,2025,53(7):1072-1081,10.基金项目
国家自然科学基金项目(No.22474139)、中国科学院仪器研制项目(No.ZDKYYQ20210005)和国家重点研发计划项目(No.2022YFC3401201)资助. Supported by the National Natural Science Foundation of China(No.22474139),the Instrument Development Project of the Chinese Academy of Sciences(No.ZDKYYQ20210005),and the National Key Research and Development Program of China(No.2022YFC3401201). （No.22474139）
