高电压技术2025，Vol.51Issue(7)：3201-3212,12.DOI:10.13336/j.1003-6520.hve.20240647
基于反应磁控溅射SnO2薄膜的氢气传感器制备工艺与性能测试
Preparation Technology and Performance Test of SnO2-based Hydrogen Sensor Prepared by Reactive Magnetron Sputtering
摘要
Abstract
Distribution transformers are characterized by low production costs,large quantities,and scattered installations.Currently,there is a lack of operating status monitoring facilities.Once a power outage occurs,the quality of power con-sumption at the user side will be directly impaired.Previous studies have shown that the concentration of hydrogen released by internal faults in transformers can effectively reflect the operating status of the equipment,but there is still a lack of low-cost,high-precision,wide-range hydrogen sensors.We adopted reactive magnetron sputtering to prepare SnO2 thin films,and proposed a mass production method for high-performance hydrogen sensors.The research finds that,under the test conditions of an oxygen-to-argon flow rate ratio of 0.7,a substrate temperature of 100℃,and a reaction vacuum of 1 Pa,the SnO2 film has good density and optimal hydrogen sensitivity.Within the volume fraction range of 2×10-3,the hydrogen sensor has good linearity and the nonlinear error is only 2.69％.Compared with commercial hydrogen sensors,SnO2 thin film sensors have higher sensitivity(3.55％/10-6)and ultra-low detection limit(12×10-9).Under the interfer-ence of other dissolved gases(CO2,CO,CH4,C2H2,C2H4,C2H6)in transformer oil,the response value of SnO2 thin film sensor to hydrogen is 7 times that of the interfering gas.In addition,magnetron sputtering is compatible with the MEMS process,which makes it easy to realize large-scale,low-cost production of hydrogen sensors,and it is expected to be widely used in the field of distribution transformer condition monitoring.关键词
配电变压器/氢气检测/磁控溅射/氧化锡薄膜/高选择性Key words
distribution transformer/hydrogen detection/magnetron sputtering/SnO2 thin film/high selectivity引用本文复制引用
申珣,褚继峰,杨爱军,潘健彬,荣命哲,王小华..基于反应磁控溅射SnO2薄膜的氢气传感器制备工艺与性能测试[J].高电压技术,2025,51(7):3201-3212,12.基金项目
国家自然科学基金(52207170 （）
U2166214) （）
中国博士后科学基金(2022TQ0252) （2022TQ0252）
陕西省自然科学基础研究计划(2023-JC-JQ-41) （2023-JC-JQ-41）
电工材料电气绝缘全国重点实验室项目(EIPE23111 （）
EIPE23408 （）
EIPE23314).Project supported by National Natural Science Foundation of China(52207170,U2166214),China Postdoctoral Science Foundation(2022TQ0252),Natural Science Basic Research Program of Shaanxi(2023-JC-JQ-41),Program of State Key Laboratory of Electrical Insulation and Power Equipment(EIPE23111,EIPE23408,EIPE23314). （52207170,U2166214）
