光学精密工程2025，Vol.33Issue(10)：1515-1523,9.DOI:10.37188/OPE.20253310.1515
基于干涉条纹区域生长算法的平板玻璃平行度测量
Parallelism measurement of flat glass based on an interferometric fringe region growth algorithm
摘要
Abstract
In order to achieve high-precision and fast measurement of parallelism of flat glass,a new mea-surement method using an area growth algorithm to segment the interference fringe map was proposed.A Fischer interferometer was used to collect the self-interference fringes generated by reflections from the front and back surfaces of the flat glass,and an area growth algorithm was used to segment the collected self-interference fringes,extract the self-interference fringes,and statistically count the number of interfer-ing fringes within the measurement aperture,so as to realize the measurement of the degree of parallelism.After comparing the region growing algorithm with the Sobel algorithm,it was found that the region grow-ing algorithm performed better in the extraction of interference fringes.Measurements of different types of interference fringes using this algorithm and comparisons of the measurement results with those of ZYGO showed that the error of parallelism measurement based on the region growing algorithm was less than 1″.Using this interferometric method of image processing,the parallelism of flat glass can be measured easily and quickly,which improves the inspection efficiency of flat glass,and at the same time has a high mea-surement accuracy.关键词
平板玻璃/平行度/区域生长/干涉测量Key words
plate glass/parallelism/region growing/interference measurement分类
机械制造引用本文复制引用
王明军,黄一凡,刘世杰,李梁玮,李蓬勃,李俊达,吴福林,徐学科,邵竹锋..基于干涉条纹区域生长算法的平板玻璃平行度测量[J].光学精密工程,2025,33(10):1515-1523,9.基金项目
国家自然科学基金重大研究计划培育项目(No.92052106) （No.92052106）
国家自然科学基金(No.61771385) （No.61771385）
