光学精密工程2025，Vol.33Issue(10)：1558-1570,13.DOI:10.37188/OPE.20253310.1558
大量程平面二维时栅误差特性与实验研究
Error characteristics and experiment study of a planar two-dimensional time-grating sensor with large measuring range
摘要
Abstract
For the traditional planar two-dimensional grating displacement sensors conducting large-area planar displacement measurements,there were some problems such as complex structure and strict grid processing requirements.A two-dimensional displacement measuring method of"dimension judgment+displacement decoupling"was proposed,which adopted a spatial periodic sensing structure to build the quadrature varying magnetic field mapping between the spatial two-dimensional displacements and time ref-erence.The influences of measuring accuracy on two-dimensional displacements caused by installation er-rors of the moving scale were studied.Through modeling simulation analysis and experimental verifica-tion,the measuring errors of two-dimensional displacement caused by the rolling attitude,the pitch atti-tude,and the yaw attitude were deeply analyzed.The experimental results show that installation errors mainly introduce DC offset,2nd and 4th harmonic errors into the two-dimension displacement measure-ment.When the air gap height between the moving scale and the fixed scale is 0.6 mm,the measuring er-ror in the X direction is not more than±8.6 μm,the measuring error in the Y direction is not more than±8.8 μm,and the resolution is 0.15 μm within the 240 mm×240 mm measuring range.The micrometer-level two-dimensional displacement measurement is achieved with millimeter-level sensing units within the 240 mm×240 mm measuring range,which promises the significant academic value and engineering appli-cation value.关键词
大量程/二维位移测量/时栅传感器/误差分析Key words
large measuring range/two-dimensional displacement measurement/time-grating sensors/error analysis分类
机械制造引用本文复制引用
陈自然,刘振越,彭凯,欧阳辉,郑永海..大量程平面二维时栅误差特性与实验研究[J].光学精密工程,2025,33(10):1558-1570,13.基金项目
国家重点研发计划(No.2023YFB3209400 （）
国家自然科学基金(No.52475549,No.52175495) （No.52475549,No.52175495）
重庆市自然科学基金(No.CSTB2023NSCQ-LZX0088) （No.CSTB2023NSCQ-LZX0088）
