光学精密工程2025，Vol.33Issue(10)：1571-1583,13.DOI:10.37188/OPE.20253310.1571
基于主动惯量补偿的高性能压电旋转驱动器
High performance piezoelectric rotary actuator based on active inertia compensation
摘要
Abstract
A novel piezoelectric rotary actuator incorporating active inertia compensation was developed to suppress the significant backward motion inherent in small-inertia rotors,thereby achieving efficient and stable stick-slip motion.By implementing active inertia compensation and optimizing the timing of the driv-ing voltage,the backward motion was effectively suppressed,leading to enhanced speed and smoothness of motion.The working principle of the actuator,based on the active inertia compensation method,was thoroughly analyzed.Structural analysis and simulations were conducted,and the theoretical feasibility of the active inertia compensation method was validated by comparing its effects with and without compensa-tion.An experimental system for driving the small-inertia rotor was established,and comprehensive tests were performed to evaluate its output performance.Experimental results indicate that 79.77%of the ro-tor's backward angle can be suppressed using active inertia compensation.The minimum resolution of the piezoelectric rotary actuator with active inertia compensation is 1.12 μrad,and the maximum speed reach-es 813.85 mrad/s.This method enables the high-efficiency and stable stick-slip motion of small-inertia ro-tor,thereby achieving high-performance output for piezoelectric rotary actuator.This has significant appli-cation potential in ultra-precision operations within complex workspaces,such as micro and nano-scale ma-nipulations.关键词
主动惯量补偿/粘滑运动/小惯量动子/回退抑制/旋转驱动器Key words
active inertia compensation/stick-slip motion/small-inertia rotor/backward motion suppres-sion/rotary actuator分类
信息技术与安全科学引用本文复制引用
于海洋,闫鹏,孟令臣..基于主动惯量补偿的高性能压电旋转驱动器[J].光学精密工程,2025,33(10):1571-1583,13.基金项目
国家自然科学基金联合基金项目(No.U24A20109) （No.U24A20109）
山东省自然科学基金重大基础研究项目(No.ZR2019ZD08) （No.ZR2019ZD08）
山东省重点研发计划(重大科技创新工程)(No.2023CXGC010207) （重大科技创新工程）
