量子电子学报2025，Vol.42Issue(4)：450-463,14.DOI:10.3969/j.issn.1007-5461.2025.04.002
基于量子纠缠光源的椭圆偏振测量技术研究进展
Progress on ellipsometry utilizing quantum entangled light sources
摘要
Abstract
Ellipsometers are essential tools used to measure the optical properties of samples,such as thin film thickness,optical constants of samples and structural profiles,by measuring the change in polarization state of polarized light before and after passing through the samples,which have wide applications in various fields,including physics,chemistry,materials science,and so on.Currently,the integration of new light sources with ellipsometry to enhance the performance of ellipsometers and expand their application scope is one of the hotspots in related research fields.Due to their unique non-classical properties and high signal-to-noise ratio,quantum entangled light sources have attracted extensive attention in the field of quantum precision measurement.In recent years,research on the principles and applications of quantum ellipsometer,which combines quantum light sources and ellipsometry,has been increasing.The fundamentals and types of classical ellipsometers are reviewed firstly in this paper.Then,based on this,the basic principles and research progress of quantum ellipsometers are mainly introduced,followed with the prospects of their future development direction.关键词
量子信息/量子纠缠光源/经典偏振仪/量子偏振仪/量子精密测量Key words
quantum information/quantum entangled light sources/classical polarimeter/quantum polarimeter/quantum precision measurement分类
数理科学引用本文复制引用
牛素俭,解孟雨,周志远,史保森..基于量子纠缠光源的椭圆偏振测量技术研究进展[J].量子电子学报,2025,42(4):450-463,14.基金项目
͏国家自然科学基金项目(62435018),科技部重点研发计划项目(2022YFB3903102,2022YFB3607700),科技部科技创新2030-量子通信与量子计算机(2021ZD0301100),中国科学技术大学统筹推进世界一流大学和一流学科建设专项资金(YD2030002023),中国航天科技集团公司第八研究院产学研合作基金(SAST2022-075),国家资助博士后研究计划项目(GZC20232559) （62435018）
