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PZT陶瓷的低温烧结研究进展

姜昆 李乐天 郑木鹏 胡永明 潘勤学 吴超峰 王轲

无机材料学报2025,Vol.40Issue(6):627-638,12.
无机材料学报2025,Vol.40Issue(6):627-638,12.DOI:10.15541/jim20240513

PZT陶瓷的低温烧结研究进展

Research Progress on Low-temperature Sintering of PZT Ceramics

姜昆 1李乐天 1郑木鹏 2胡永明 3潘勤学 4吴超峰 5王轲6

作者信息

  • 1. 湖北大学 微电子学院,微纳电子材料与器件湖北省重点实验室,武汉 430062||清华大学 材料科学与工程学院,北京 100084
  • 2. 北京工业大学 材料科学与工程学院,北京 100124
  • 3. 湖北大学 微电子学院,微纳电子材料与器件湖北省重点实验室,武汉 430062
  • 4. 北京理工大学 机械与车辆学院,北京 100081
  • 5. 桐乡清锋科技有限公司,嘉兴 314501
  • 6. 清华大学 材料科学与工程学院,北京 100084
  • 折叠

摘要

Abstract

Pb(Zr,Ti)O3(PZT)ceramics play a crucial role in fields such as national defense,healthcare,communication,and energy conversion due to their excellent piezoelectric,ferroelectric,and pyroelectric properties.However,the sintering temperature of PZT ceramics usually exceeds 1200℃,resulting in high energy consumption and a large amount of PbO volatilization.This volatilization disrupts the stoichiometric balance of PZT ceramics,thereby adversely affecting their electrical properties.Moreover,the rapid development of piezoelectric multilayer devices further requires PZT ceramics to be co-sintered with low-cost metal electrodes at low temperatures.To address these challenges,researchers have extensively investigated the low-temperature sintering of PZT piezoelectric ceramics,successfully reducing the sintering temperature of PZT ceramics to below 1000℃,which has attracted widespread attention.Starting from the structural characteristics and physical properties of PZT ceramics,this article reviews the current research status of low-temperature sintering technology in the field of PZT ceramics.It mainly introduces the current status of low-temperature sintering techniques,including spark plasma sintering,hot-pressing sintering,cold sintering,as well as the use of sintering aids such as forming solid solutions,liquid-phase sintering,and transient liquid-phase sintering.The influence of these sintering techniques on the microstructure and electrical properties of PZT piezoelectric ceramics is systematically summarized.The issue of electrical performance degradation caused by sintering aids and possible solutions are analyzed.At last,future development trends of low-temperature sintering technologies for PZT ceramic are explored.

关键词

PZT/低温烧结/压电陶瓷/钙钛矿/综述

Key words

PZT/low-temperature sintering/piezoelectric ceramic/perovskite/review

分类

信息技术与安全科学

引用本文复制引用

姜昆,李乐天,郑木鹏,胡永明,潘勤学,吴超峰,王轲..PZT陶瓷的低温烧结研究进展[J].无机材料学报,2025,40(6):627-638,12.

基金项目

国家自然科学基金(U24A20203,52472117) (U24A20203,52472117)

国家重点研发计划(2020YFA0711700)National Natural Science Foundation of China(U24A20203,52472117) (2020YFA0711700)

National Key R&D Program of China(2020YFA0711700) (2020YFA0711700)

无机材料学报

OA北大核心

1000-324X

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