光学精密工程2025，Vol.33Issue(11)：1739-1749,11.DOI:10.37188/OPE.20253311.1739
基于频域滤波面形的毫米级束径离子束驻留时间补偿
Dwell time compensation for millimeter spot-sized ion beam figuring based on frequency-domain filtered surface
摘要
Abstract
This study investigates and enhances the corrective capability of small-sized tool influence func-tions(TIFs)in addressing form errors with spatial wavelengths comparable to their dimensions,through the analysis and optimization of millimeter spot-sized ion beam figuring(IBF).A radial shell ribs evalua-tion method was established to quantify the corrective performance of small-sized TIFs across multiple fre-quencies,employing root-mean-square density(RMSD)distribution,convergence rates,and periodic sur-face processing outcomes.Based on this framework,a dwell time compensation strategy incorporating high-pass filtering was developed,resulting in improved convergence rates within the target spatial fre-quency bands.Experimental results demonstrate that the radial shell ribs analysis provides an efficient and convenient approach to evaluating TIF corrective capability across frequencies.The introduced dwell time compensation method significantly enhances the single-cycle convergence rate of small-sized TIFs within their effective frequency range.Specifically,for the critical frequency band associated with corrective ca-pacity transitions(0.186 to 0.385 mm⁻¹),the average convergence rate of a 2-mm full width at half maxi-mum(FWHM)TIF increased from 76.4%to 91.7%.This approach enables consistent convergence of form errors throughout the entire frequency spectrum during processing with a single TIF,thereby advanc-ing the manufacturing of high-precision optical components.关键词
超精密加工/离子束修形/驻留时间/收敛率/细束径去除函数/修形能力Key words
ultra-precision fabrication/ion beam figuring/dwell time/convergence rate/small-sized tool influence function/corrective capability分类
信息技术与安全科学引用本文复制引用
卞萌,胡海翔,唐瓦,季鹏,张学军..基于频域滤波面形的毫米级束径离子束驻留时间补偿[J].光学精密工程,2025,33(11):1739-1749,11.基金项目
国家自然科学基金资助项目(No.62127901,No.12103054,No.62405314,No.62305333,No.62375260) （No.62127901,No.12103054,No.62405314,No.62305333,No.62375260）
国家重点研发计划资助项目(No.2022YFB3403405) （No.2022YFB3403405）
中国科学院青年创新促进会(No.2019221,No.Y2023062) （No.2019221,No.Y2023062）
中国科协青年人才托举工程资助项目(No.2022QNRC001) （No.2022QNRC001）
吉林省青年精英科学家赞助计划(No.QT202222) （No.QT202222）
长春市科技计划资助项目(No.2024GZZ19) （No.2024GZZ19）
吉林省科技发展计划资助项目(No.SKL202402021) （No.SKL202402021）
