光学精密工程2025，Vol.33Issue(12)：1831-1841,11.DOI:10.37188/OPE.20253312.1831
基于空间约束的差动共焦离轴非球面自适应测量方法
Adaptive measurement of off-axis aspheric surfaces of differential confocal based on spatial constraints
摘要
Abstract
The asymmetrical shape of the off-axis aspheric surface and the nonlinear change of its surface curvature bring challenges to the high-precision measurement of surface shape.In order to solve the prob-lem that existing off-axis aspheric surface shape measurement methods were highly dependent on precise initial alignment of the test piece and showed poor adaptability to curvature variations,we proposed a spa-tially-constrained differential confocal adaptive measurement method to achieve adaptive and high-precision measurement of off-axis aspheric surfaces without initial pose dependence.First,based on the translation-rotation scanning measurement principle and the demonstrated performance of differential confocal technol-ogy in anti-surface inclination accurate fixed focusing,we developed a spatial constraint model incorporat-ing both distance and tilt angle parameters between designed measurement points and actual test locations.This model enabled optimized spiral scanning path planning with curvature-adaptive adjustment capability for off-axis aspheric surfaces.Experimental verification demonstrated surface form accuracy with root mean square(RMS)errors below 10 nanometers and 3σ values under 5 nanometers compared to Zygo interferometer refer-ences,meeting the requirements of high-precision measurement of off-axis aspheric surfaces.关键词
空间约束/差动共焦/离轴非球面/自适应测量/路径规划Key words
spatial constraints/differential confocal/off-axis aspherical/adaptive measurement/path planning分类
信息技术与安全科学引用本文复制引用
马维阔,邱丽荣,李奕豪,赵维谦,刘昱含..基于空间约束的差动共焦离轴非球面自适应测量方法[J].光学精密工程,2025,33(12):1831-1841,11.基金项目
中央高校基本科研业务费专项资金资助(No.2023CX01006) （No.2023CX01006）
