光学精密工程2025，Vol.33Issue(12)：1876-1888,13.DOI:10.37188/OPE.20253312.1876
微束斑RHEED类平行束电子枪设计
Design of a quasi-parallel beam electron gun with micro beam spot for Reflection High Energy Electron Diffraction
摘要
Abstract
In response to the application requirements of high-resolution Reflection High-Energy Electron Diffraction(RHEED)in the fields of microelectronics manufacturing and surface analysis,and considering that a long working distance,micro-beam spot size,and small beam half-angle electron gun are key com-ponents for achieving high-resolution RHEED detection,a micro-beam spot RHEED quasi-parallel beam electron gun was developed.The characteristics of the electron gun's electron optical system were ana-lyzed,and a low-aberration focusing magnetic lens was designed utilizing electron optical simulation soft-ware.An experimental platform was set up to measuring the beam spot diameter,beam current,and beam half-angle performance of the developed electron gun,as well as to conduct diffraction imaging tests on highly oriented pyrolytic graphite(HOPG)samples.The experimental results show that at a working distance of 500 mm,the beam spot diameter of the RHEED quasi-parallel beam electron gun is 47.1 μm(at an acceleration voltage of 30 kV),The emission current and the beam half-angle are 144.96 μA and 0.289 mrad respectively(at an acceleration voltage of 15 kV).Clear diffraction spots which intensity cor-responding to the crystal structure factors were obtained on the HOPG sample.关键词
电子光学/反射式高能电子衍射/电子枪/类平行电子束Key words
electron optics/Reflection High Energy Electron Diffraction(RHEED)/electron gun/qua-si-parallel electron beam分类
信息技术与安全科学引用本文复制引用
赵伟霞,史丽娜,刘俊标,殷伯华,韩立..微束斑RHEED类平行束电子枪设计[J].光学精密工程,2025,33(12):1876-1888,13.基金项目
中国科学院科研仪器设备研制项目(No.PTYQ2024BJ0004) （No.PTYQ2024BJ0004）
