光学精密工程2025，Vol.33Issue(12)：1916-1928,13.DOI:10.37188/OPE.20253312.1916
四质量高频三轴MEMS陀螺设计及制造
Design and fabrication of a quad-mass high-frequency triaxial MEMS gyroscope
摘要
Abstract
To address the limited interference resistance and large size of conventional monolithic triaxial gyroscopes,a novel quad-mass high-frequency triaxial MEMS gyroscope was presented.Compared with traditional gyroscopes,this device had a relatively higher resonance frequency(～30 kHz),and the size of the sensitive structure was only 3 mm×2.56 mm.This paper described the sensitive structural form and working principle of the designed gyroscope.Moreover,the width of the beams of the sensitive structure was optimized through a multi-objective genetic algorithm to make the resonance frequency of the working mode higher than 30 kHz and the frequency difference between the drive mode and the sense mode less than 200 Hz.It was fabricated using a three-wafer bonding technology and characterized by a swept-fre-quency testing system.The experimental results show that the resonance frequencies and quality factors of its drive mode,X-axis,Y-axis,and Z-axis sense mode are 29 692 Hz and 1 274,31 290 Hz and 354,29 881 Hz and 305,30 721 Hz and 393,respectively.The results verify the correctness of the design and research methods,and provide a feasible solution for the development of high-frequency triaxial MEMS gyroscopes.关键词
微机电陀螺仪/单片三轴/高频/多目标优化Key words
MEMS gyroscope/monolithic triaxial/high-frequency/multi-objective optimization分类
机械制造引用本文复制引用
魏雯强,田慧敏,蔡麒,崔让,李豪冉,曹慧亮..四质量高频三轴MEMS陀螺设计及制造[J].光学精密工程,2025,33(12):1916-1928,13.基金项目
国家重点研发计划(No.2022YFB3205000) （No.2022YFB3205000）
国家自然科学基金项目(No.52475586,No.U2230206) （No.52475586,No.U2230206）
