光学精密工程2025，Vol.33Issue(13)：2020-2035,16.DOI:10.37188/OPE.20253313.2020
微小型MEMS-FPI近红外光谱仪
Miniaturized near-infrared spectrometer based on MEMS-FPI sensor
摘要
Abstract
Traditional near-infrared spectrometers are bulky and expensive,limiting their widespread appli-cation.Based on Hamamatsu's MEMS-FPI near-infrared spectroscopy sensor C14272,this research suc-cessfully developed a miniaturized near-infrared spectrometer operating in the 1350-1650 nm wavelength range.The system adopts a modular architecture,integrating efficient signal acquisition and data process-ing units,significantly reducing system costs.Through systematic performance evaluation,including wavelength accuracy,spectral resolution,dynamic range,and other metrics,combined with a tempera-ture characteristic compensation algorithm that effectively suppresses temperature drift effects,experimen-tal results demonstrate that this spectroscopic analysis system possesses excellent stability and reproducibil-ity,with a spectral resolution of approximately 15.2 nm.Combined with a convolutional neural network algorithm,the glucose solution concentration prediction model exhibits high accuracy(R2>0.99)and low error rates(RMSE<0.2％)when detecting unknown samples.The developed miniaturized near-infra-red spectrometer provides an economical and efficient solution for biomedical detection and food quality analysis.关键词
红外光谱/微小型光谱仪/卷积神经网络/葡萄糖浓度检测Key words
infrared spectroscopy/micro-spectrometer/convolutional neural network/glucose concen-tration detection分类
机械制造引用本文复制引用
厉奔,陈方方,王飞,郑赞胜,邹益波,虞益挺..微小型MEMS-FPI近红外光谱仪[J].光学精密工程,2025,33(13):2020-2035,16.基金项目
宁波市重大科技任务攻关项目(科技创新2025重大专项)(No.2022Z138) （科技创新2025重大专项）
甬江引才工程"3315计划"创新团队项目(No.2021A-041-C) （No.2021A-041-C）
宁波市重点技术研发项目(No.2023T018) （No.2023T018）
