光学精密工程2025，Vol.33Issue(13)：2056-2065,10.DOI:10.37188/OPE.20253313.2056
全息曝光干涉条纹相位锁定系统设计
Design of holographic exposure interference fringe phase locking system
摘要
Abstract
To fabricate high-quality holographic gratings and improve the fringe stability of the beam-split-ting amplitude exposure system,this study analyzes the effects of different beam-splitting devices on fringe stability and designs a phase-locking system for holographic grating interference fringes.First,based on the principles of interference exposure and the impact of fringe drift on exposure contrast,we analyzed the directional requirements for light sources when using different beam-splitting components.A detection method for interference fringe variations,utilizing Moiré fringes from a reference grating,was investigat-ed.Suitable detectors and actuators were selected,and a closed-loop fringe phase-locking system was de-signed and implemented using an STM32 microcontroller integrated with a PID algorithm.Experimental results demonstrate that the locking system achieves a control frequency of 1 kHz,effectively suppressing low-frequency drift primarily within 0～3 Hz.After stabilization,the root mean square(RMS)value of fringe drift was reduced to 0.004 7λ.When laser pointing stability is insufficient,the proposed grating-based beam splitting combined with single-point phase locking can meet the fringe stability requirements for large-scale holographic grating fabrication.关键词
全息光栅/相位锁定/Moiré条纹/闭环控制Key words
holographic grating/phase locking/Moiré fringe/closed loop control分类
信息技术与安全科学引用本文复制引用
王起程,王新宇,于宏柱,姜岩秀,李文昊..全息曝光干涉条纹相位锁定系统设计[J].光学精密工程,2025,33(13):2056-2065,10.基金项目
国家重点研发计划资助项目(No.2022YFB3606100) （No.2022YFB3606100）
中国科学院稳定支持基础研究领域青年团队计划资助项目(No.YSBR-103) （No.YSBR-103）
吉林省科技发展计划科技条件与平台建设计划资助项目(No.20220505001ZP) （No.20220505001ZP）
