光学精密工程2025，Vol.33Issue(13)：2066-2075,10.DOI:10.37188/OPE.20253313.2066
谐波减速器集成式薄膜温度传感器设计与测试
Design and testing of thin-film temperature sensors integrated on harmonic reducer
摘要
Abstract
Real-time acquisition and monitoring of temperature data during the operation of harmonic re-ducers are crucial for timely fault diagnosis and performance optimization.This study presents an in situ in-tegrated film temperature sensor within the harmonic reducer.To minimize the impact of flexspline strain on the accuracy of temperature measurements,finite element analysis was employed to characterize the strain distribution under various operating conditions.Subsequently,the sensor's structural design was op-timized to mitigate strain-induced measurement interference.Utilizing MEMS technology,the film tem-perature sensor was fabricated,with strain effects compensated to enhance measurement precision.Evalu-ation results demonstrate a static temperature measurement accuracy of±0.3％,an accuracy of±0.047％during wave generator rotation,±0.23％at 18.39 ℃,and±0.52％at 50.21 ℃.Further-more,repeatability tests conducted between 20 ℃ and 120 ℃ yielded standard deviations relative to a ref-erence temperature sensor ranging from 0.072 ℃ to 0.296 ℃,confirming reliable real-time temperature acquisition.These findings indicate that the developed film temperature sensor can accurately monitor the operating temperature of harmonic reducers,providing a valuable tool for improved diagnostic and optimi-zation processes.关键词
温度传感器/谐波减速器/有限元分析/集成式传感器Key words
temperature sensor/harmonic reducer/finite element analysis/integrated sensor分类
信息技术与安全科学引用本文复制引用
曹嘉鋆,沈文强,王晓东,杨金祎,娄志峰..谐波减速器集成式薄膜温度传感器设计与测试[J].光学精密工程,2025,33(13):2066-2075,10.基金项目
国家重点研发计划资助项目(No.2023YFB4704301) （No.2023YFB4704301）
