上海航天（中英文）2025，Vol.42Issue(4)：53-58,6.DOI:10.19328/j.cnki.2096-8655.2025.04.005
42°Y-cut LiTaO3/SiO2/α-Si/Si衬底上的具有倾斜电极的无杂散声表面波谐振器
Spurious-free SAW Resonators on 42°Y-cut LiTaO3/SiO2/α-Si/Si Substrate with Tilted IDT
摘要
Abstract
With the growing demand for 5G technology applications,there is an urgent need to improve the performance of surface acoustic wave(SAW)filters in radio frequency(RF)front-end modules.The shear horizontal(SH)SAW resonators based on piezoelectric thin films exhibit excellent characteristics.However,some transverse spurious modes may appear in the admittance responses of SAW resonators,leading to severe in-band ripples in the SAW filters constructed from such resonators,which hinders their application in 5G technology.This paper proposes an SH-SAW resonator based on a hetero-layered substrate of 42°Y-cut LiTaO3/SiO2/α-Si/Si.To investigate the generation of transverse modes,the dispersion characteristics and slowness curves of the device are analyzed using the finite element method(FEM).The fabricated SAW resonator with normal interdigital transducers(IDTs)achieves an electromechanical coupling coefficient(k2eff)of 11.1%and a Bode-Qmax of 1 317.Additionally,an SAW resonator with tilted IDTs is fabricated to suppress the spurious modes.With a tilt angle of 6°,the measured results demonstrate effective suppression of transverse spurious modes.关键词
声表面波(SAW)谐振器/多层复合衬底/有限元法(FEM)/横向杂散模态/倾斜叉指换能器Key words
surface acoustic wave(SAW)resonator/hetero-layered substrate/finite element method(FEM)/transverse spurious mode/tilted interdigital transducer分类
信息技术与安全科学引用本文复制引用
李世佳,吴宗霖,钱航宇,杨国敏..42°Y-cut LiTaO3/SiO2/α-Si/Si衬底上的具有倾斜电极的无杂散声表面波谐振器[J].上海航天（中英文）,2025,42(4):53-58,6.基金项目
国家自然科学基金资助项目(62471146) （62471146）
