首页|期刊导航|Journal of Materiomics|Texture modulation of ferroelectric Hf_(0.5)Zr_(0.5)O_(2) thin films by engineering the polymorphism and texture of tungsten electrodes

Texture modulation of ferroelectric Hf_(0.5)Zr_(0.5)O_(2) thin films by engineering the polymorphism and texture of tungsten electrodes

Kun Yang Hyun Woo Jeong Jaewook Lee Yong Hyeon Cho Ju Yong Park Hyojun Choi Young Yong Kim Younghwan Lee Yunseok Kim Min Hyuk Park

Journal of Materiomics2025，Vol.11Issue(4)：P.449-459,11.

Journal of Materiomics2025，Vol.11Issue(4)：P.449-459,11.DOI:10.1016/j.jmat.2025.101015

Texture modulation of ferroelectric Hf_(0.5)Zr_(0.5)O_(2) thin films by engineering the polymorphism and texture of tungsten electrodes

Kun Yang ¹Hyun Woo Jeong ¹Jaewook Lee ¹Yong Hyeon Cho ¹Ju Yong Park ¹Hyojun Choi ¹Young Yong Kim ²Younghwan Lee ³Yunseok Kim ⁴Min Hyuk Park⁵

作者信息

1. Department of Materials Science and Engineering&Inter-university Semiconductor Research Center,College of Engineering,Seoul National University,Seoul,08826,Republic of Korea
2. Beamline Division,Pohang Accelerator Laboratory,Pohang University of Science&Technology,Pohang,37673,Republic of Korea
3. School of Materials Science and Engineering,Chonnam National University,Gwangju,61186,Republic of Korea
4. School of Advanced Materials and Engineering,Sungkyunkwan University,Suwon,16419,Republic of Korea
5. Department of Materials Science and Engineering&Inter-university Semiconductor Research Center,College of Engineering,Seoul National University,Seoul,08826,Republic of Korea Research Institute of Advanced Materials,Seoul National University,Seoul,08826,Republic of Korea Institute of Engineering Research,College of Engineering,Seoul National University,Seoul,08826,Republic of Korea
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摘要

关键词

Ferroelectric/Hafnium oxide/Zirconium oxide/Tungsten/Crystallographic texture

分类

数理科学

引用本文复制引用

Kun Yang,Hyun Woo Jeong,Jaewook Lee,Yong Hyeon Cho,Ju Yong Park,Hyojun Choi,Young Yong Kim,Younghwan Lee,Yunseok Kim,Min Hyuk Park..Texture modulation of ferroelectric Hf_(0.5)Zr_(0.5)O_(2) thin films by engineering the polymorphism and texture of tungsten electrodes[J].Journal of Materiomics,2025,11(4):P.449-459,11.

基金项目

supported by the National Research Foundation of Korea,funded by the Ministry of Science and ICT(RS-2024-00445552)(50%) （RS-2024-00445552）

supported by the Nano&Material Technology Development Program through the National Research Foundation of Korea(NRF)funded by Ministry of Science and ICT(RS-2024-00444182)(50%). （NRF）

Journal of Materiomics

ISSN：2352-8478

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