表面技术2025，Vol.54Issue(16)：18-38,21.DOI:10.16490/j.cnki.issn.1001-3660.2025.16.002
CVD金刚石薄膜与涂层制备技术及关键领域应用研究进展
Research Progress on Preparation Technologies and Key Field Applications of CVD Diamond Films and Coatings
摘要
Abstract
Diamond,due to its exceptional physical and chemical properties,holds vast application prospects in fields such as mechanical processing,biomedicine,quantum technology,optics,energy,and aerospace.Chemical Vapor Deposition(CVD)is one of the most commonly used techniques for preparing diamond films and coatings.This paper elaborates on the growth mechanisms of CVD diamonds,including gas delivery and activation,surface adsorption and decomposition,nucleation,and growth processes.The CVD technique dynamically controls the film deposition process,utilizing high temperature and specific atmospheric conditions to decompose gaseous carbon sources and form diamond structures.The article also introduces various CVD diamond preparation techniques,such as Hot Filament Chemical Vapor Deposition,Microwave Plasma Chemical Vapor Deposition,and Direct Current Plasma Enhanced Chemical Vapor Deposition,and compares their principles and characteristics. In terms of process control,the analysis covers the impact of gas source system selection and deposition parameter control on the quality and performance of diamond films.By optimizing parameters such as types and concentration of carbon source gases,reaction atmosphere,deposition pressure,and temperature,the growth rate and quality of diamond films can be significantly enhanced.Precise control of these parameters is crucial for achieving high-quality diamond growth. The article explores the application of CVD diamond films and coatings in quantum technology,optics,energy,mechanical processing,biomedicine,and aerospace.In the quantum technology field,diamond films are widely used in quantum sensing,computing,and communication due to their excellent optical and electronic properties.In optics,diamond films are ideal materials for ultraviolet laser windows and infrared optical components due to their high transparency and wear resistance.In the energy sector,diamond films show significant potential in nuclear radiation detectors and electrode materials.Diamond coatings are extensively used in mechanical processing for cutting,drilling,and grinding due to their extreme hardness and wear resistance.In the biomedical field,diamond coatings are widely applied in medical devices and biosensors due to their high hardness,wear resistance,excellent chemical inertness,and biocompatibility.In aerospace,diamond coatings significantly enhance the reliability of key components under extreme conditions. Despite the breakthrough applications of CVD diamond techniques in various fields,challenges remain in terms of large-scale production,long-term biosafety,and performance optimization under complex conditions.Future research should focus on the development of multifunctional coatings,low-cost production and large-scale application,biosafety verification and long-term stability,and performance limits under extreme conditions.The review points out that although chemical vapor deposition diamond coatings face some challenges,their unique properties and broad application prospects make them an important research direction in future materials science and engineering.Further breakthroughs in large-size single crystal growth,low-temperature high-quality deposition,and intelligent process control are needed to meet the diverse needs of high-end manufacturing and technological development.关键词
金刚石薄膜/金刚石涂层/化学气相沉积/热丝化学气相沉积/微波等离子体化学气相沉积/CVD金刚石应用Key words
diamond films/diamond coatings/chemical vapor deposition/hot filament chemical vapor deposition/microwave plasma chemical vapor deposition/applications of CVD diamonds分类
化学化工引用本文复制引用
吴勇,郭于洋,孙清云,陈辉,杨甫,夏思瑶..CVD金刚石薄膜与涂层制备技术及关键领域应用研究进展[J].表面技术,2025,54(16):18-38,21.基金项目
国家自然科学基金面上基金项目(52175182) （52175182）
国家科技重大专项(2024ZD0712801) （2024ZD0712801）
湖北省自然科学基金(2022CFB936)The National Natural Science Foundation of China General Program(52175182) （2022CFB936）
National Science and Technology Major Project(2024ZD0712801) （2024ZD0712801）
Natural Science Foundation of Hubei Province(2022CFB936) （2022CFB936）
