青岛大学学报（自然科学版）2025，Vol.38Issue(3)：62-67,6.DOI:10.3969/j.issn.1006-1037.2025.03.10
基于半刚性气囊的反应烧结碳化硅精密抛光特性
Precision Polishing Characteristics of Reaction-bonded Silicon Carbide Based on Semi-rigid Bonnet
摘要
Abstract
The experiment was conducted to analysis the performance of a semi-rigid bonnet in the precision polishing of reaction-bonded silicon carbide,aiming to investigate its material removal characteristics and surface quality improvement effects.The 3D mor-phology of the polished surface was obtained using a white light interferometer,and the spherical characteristics were verified through 2D cross-sectional profiles to evaluate the high-precision polishing outcome.The results show that the amount of material removed increases progressively with longer dwell time and higher spindle speed.After polishing with the semi-rigid bonnet,the surface roughness of the workpiece decreased from 251.69 nm to 8.72 nm,with a reduction of 96.54%,which significantly improved surface uni-formity and reduced microscopic defects.关键词
材料去除/气囊抛光/精密抛光/半刚性气囊Key words
material removal/bonnet polishing/precision polishing/semi-rigid bonnet分类
矿业与冶金引用本文复制引用
崔青青,傅建记,吴威,柯晓龙..基于半刚性气囊的反应烧结碳化硅精密抛光特性[J].青岛大学学报（自然科学版）,2025,38(3):62-67,6.基金项目
福建省自然科学基金(批准号:2022J011245)资助. （批准号:2022J011245）
