太赫兹科学与电子信息学报2025，Vol.23Issue(8)：836-843,8.DOI:10.11805/TKYDA2024501
基于MUT自谐振的太赫兹开口波导介电测试方法
Dielectric measurement method of terahertz open waveguide based on MUT self-resonance
摘要
Abstract
Dielectric characterization of materials is crucial for accurately assessing their terahertz electromagnetic properties and ensuring their effectiveness in relevant applications.A method is proposed for dielectric property testing of Materials Under Test(MUT)based on their self-resonant characteristics,combining electronic terahertz technology with waveguide aperture reflection.The electromagnetic process and influencing factors of the self-resonance of the MUT at the rectangular waveguide aperture are clarified using the Finite-Difference Time-Domain(FDTD)method for electromagnetic field numerical analysis.Subsequently,the relationship between the waveguide reflection coefficient and the dielectric properties of the MUT is obtained.Based on the frequency shift of the material's self-resonance,grooves and etched channels are created on a single-crystal silicon wafer which is then bonded with polydimethylsiloxane(PDMS)to measure the dielectric properties of the liquid within the channels.Finally,a testing system with a single-crystal silicon wafer as the MUT is constructed in the laboratory according to the simulation rules,verifying the reliability of the simulation results and the feasibility of the proposed dielectric testing method.关键词
矩形波导/时域有限差分(FDTD)/被测材料(MUT)谐振/太赫兹介电测试Key words
rectangular waveguide/Finite-Difference Time-Domain(FDTD)/Materials Under Test(MUT)resonance/terahertz dielectric testing分类
信息技术与安全科学引用本文复制引用
贵雨,宁兴凯,李岩,邓建钦,李川,于壮,李环廷,王斌,高睦志..基于MUT自谐振的太赫兹开口波导介电测试方法[J].太赫兹科学与电子信息学报,2025,23(8):836-843,8.基金项目
国家自然科学基金面上资助项目(42174141) （42174141）
国家自然科学基金青年资助项目(62301611) （62301611）
青岛市市南区科技计划资助项目(2022-4-010-YY) （2022-4-010-YY）
