广西科技大学学报2025，Vol.36Issue(4)：74-83,10.DOI:10.16375/j.cnki.cn45-1395/t.2025.04.010
两类非圆截面纤维空气过滤性能数值仿真研究
A numerical study on the filtration performance of two types of non circular cross-section fibers used in high-efficiency air filters
摘要
Abstract
The high-efficiency air filter is a crucial equipment for ensuring an ultra-clean production environment in integrated circuits.The cross-sectional shape structure of the fiber plays a significant role in determining the filtration performance.Considering the particle trapping behavior under the combined effects of inertia,interception,and Brownian diffusion,this study numerically solved the capture efficiency and filtration pressure drop characteristics of two types of non-circular cross-sectional fibers which are square and elliptical.The relationship between the cross-sectional shape parameters of these fibers and their filtration performance were analyzed,and a quality factor was introduced to quantify the advantages of fibers.The results show that both square and elliptical fibers exhibit higher average capture efficiencies compared with circular fibers.For submicron particles(dp<0.5 μm)where Brownian diffusion dominates as the primary capture mechanism,elliptical fibers offer superior advantages in terms of capture efficiency,leading to an overall improvement in comprehensive filtration performance by approximately 10.0%-20.0%.For micron particles(dp>1.0 μm),square fibers show advantages in comprehensive filtration performance with a more-than-40%improvement.关键词
空气过滤器/非圆截面纤维/过滤性能/集成电路/数值仿真Key words
air filter/non circular cross-section fibers/filtration performance/integrated circuit/numerical simulation分类
建筑与水利引用本文复制引用
黄小宇,王云华,杨会,朱辉..两类非圆截面纤维空气过滤性能数值仿真研究[J].广西科技大学学报,2025,36(4):74-83,10.基金项目
广西自然科学基金项目(2017GXNSFAA198184) （2017GXNSFAA198184）
国家自然科学基金项目(52264017)资助 （52264017）
