光学精密工程2025，Vol.33Issue(14)：2166-2177,12.DOI:10.37188/OPE.20253314.2166
镜片面形误差与法珀标准具性能指标的关系
Relationship between mirror surface figure errors and performance metrics of Fabry-Pérot etalons
摘要
Abstract
To achieve deterministic control of surface figure errors in the fabrication of Fabry-Pérot etalon mirrors,this study thoroughly investigated the relationship between mirror surface figure errors and the performance of etalons.A theoretical model was established to analyze the impact of surface figure errors on the transmission spectrum of the etalon,quantitatively revealing the effects of different surface profiles on key performance parameters,thereby optimizing manufacturing processes and surface control parame-ters.The research showed that the mean value of surface figure errors had a strong linear correlation with the central wavelength shift,with a sensitivity coefficient of 1.65 pm/nm that was theoretically derived.The peak-to-valley value of surface figure errors affected the spectral linewidth broadening and peak trans-mittance attenuation.Within the region where the peak-to-valley value was less than λ/40(15.8 nm),both linewidth and peak transmittance gradually converged.To validate the theoretical model,a transmis-sion spectrum test system with picometer-level accuracy was constructed.Through qualitative validation via clear aperture testing and quantitative analysis of surface figure errors,it was determined that the surface uni-formity of the central plate exerted a greater influence on etalon performance than that of the edge plates.A critical surface figure error control threshold satisfying the performance specifications was established,guid-ing etalon fabrication experiments.Results demonstrate that for a 30 mm-diameter etalon with the peak-to-valley value controlled within 10 nm,the peak transmittance reaches 98.63％,achieving narrowband filter-ing with a bandwidth of 32.8 pm at the central wavelength of 532.199 nm,which approaches the theoretical design limit.These conclusions hold significant application value for manufacturing high-precision etalons with high transmittance,narrow bandwidth,and picometer-level central wavelength stability.关键词
面形误差/标准具/峰谷值/法布里-珀罗Key words
surface figure error/etalon/peak-to-valley value/Fabry-Pérot分类
机械制造引用本文复制引用
于涵,江毅..镜片面形误差与法珀标准具性能指标的关系[J].光学精密工程,2025,33(14):2166-2177,12.基金项目
国家自然科学基金-航天科技集团企业联合重点项目(No.U20B2057) （No.U20B2057）
