光学精密工程2025，Vol.33Issue(14)：2206-2219,14.DOI:10.37188/OPE.20253314.2206
316L不锈钢表面二次电子发射抑制微结构的激光辅助水射流加工实验
Experimental laser assisted water jet machining of secondary electron emission suppression microstructures on 316L stainless steel surface
摘要
Abstract
In order to reduce the secondary electron emissivity of the surface of 316L stainless steel,an ar-ray of grooves and grids that can reduce the secondary electron emissivity of the surface of stainless steel was designed.The designed arrays were pmachined by laser assisted waterjet technology and the surface secondary electron emission rate was detected.First,the grooves and grid arrays were designed to reduce the number of secondary electron emissions using CASINO simulation software.Then the response sur-face method was used to study the effect of laser assisted water jetting process parameters on the depth-to-width ratio of the grooves,and a regression prediction model of the grooves' depth-to-width ratio was ob-tained to obtain the combination of maximum depth-to-width ratio processing parameters.Finally,the la-ser assisted waterjet machining of grooves and grid arrays was carried out,and the secondary electron emis-sivity of the surface was detected.The experimental results show that the secondary electron emissivity of the groove and lattice array surfaces decreased dramatically,with the peak secondary electron emissivity of 1.48 and 1.25,respectively,which are 36.50％and 46.35％lower than that of the unprocessed surface with the peak secondary electron emissivity of 2.33,respectively.The performance of groove array and grid array in suppressing the secondary electron emission rate of 316L stainless steel surface is excellent.关键词
激光辅助水射流/316L不锈钢/二次电子发射/激光微纳加工Key words
laser assisted water jet/316L stainless steel/secondary electron emission/laser micro-nano-fabrication分类
矿业与冶金引用本文复制引用
徐相悦,姚彦如,褚东凯,刘雪飞..316L不锈钢表面二次电子发射抑制微结构的激光辅助水射流加工实验[J].光学精密工程,2025,33(14):2206-2219,14.基金项目
国家重点研发计划项目(No.2023YFC2413301) （No.2023YFC2413301）
山东省重大科技创新工程项目(No.2023CXGC010207) （No.2023CXGC010207）
山东省青年科学基金项目(No.ZR2024QE039) （No.ZR2024QE039）
