光学精密工程2025，Vol.33Issue(14)：2220-2230,11.DOI:10.37188/OPE.20253314.2220
平面光栅刻划机微定位系统压电校正技术
Micro-positioning error monitoring and piezoelectric correction of plane grating ruling machine
摘要
Abstract
To address the issue of the decline in micro-positioning accuracy caused by the hysteresis nonlin-earity characteristic of the piezoelectric ceramic driver during the engraving process of the planar grating en-graving machine,a composite control error-compensation method based on the segmented Prandtl-Ishlin-skii(PI)model was proposed to enhance the indexing positioning accuracy and stability of the grating en-graving.A set of error-monitoring and correction systems for grating micro-positioning with a certain de-gree of accuracy was designed.By constructing a segmented PI model to describe its nonlinear behavior,the hysteresis characteristics of the piezoelectric ceramic actuator were identified using the least-squares method.The inverse model was used as a feedforward compensation link,combined with closed-loop feedback control to form a composite control strategy,thereby achieving dynamic error correction.Experi-mental data show that,compared with before adding the PI inverse model feedforward compensation,the positioning error of the grating line has been reduced from±20 nm to within±10 nm.Ensure the consis-tency of the engraved grooves,apply the calibration of the grating etching division degree to correct the po-sitioning error,providing reliable technical support for the preparation of high-density gratings.Future re-search will focus on integrating and optimizing intelligent algorithms to further improve positioning accura-cy,as well as exploring the expansion application of this technology in curved surface gratings and variable grating pitch etching.关键词
光栅刻划机/微定位系统/定位精度/P-I模型/压电Key words
grating writer/micro positioning system/positioning accuracy/P-I model/piezoelectric分类
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杨春吉,李文昊,于宏柱,姚雪峰,张博,于硕..平面光栅刻划机微定位系统压电校正技术[J].光学精密工程,2025,33(14):2220-2230,11.基金项目
国家重点研发计划(No.2023YFF0718100) （No.2023YFF0718100）
吉林省科技发展计划项目(No.20240302025GX) （No.20240302025GX）
吉林省科技发展计划科技条件与平台建设计划(No.20220505001ZP) （No.20220505001ZP）
国家自然基金联合项目(No.U21A20509) （No.U21A20509）
中国科学院科研仪器设备研制项目(No.YJKYYQ2021002) （No.YJKYYQ2021002）
