实验科学与技术2025，Vol.23Issue(5)：32-39,8.DOI:10.12179/1672-4550.20240056
基于场效应管型气敏传感器的微电子工艺实验设计
Design of Microelectronic Process Experiment Based on Field-Effect Transistor Gas Sensors
摘要
Abstract
At present,China is facing a talent shortage in the integrated circuit industry,and it is imperative to cultivate talents with innovative and practical capabilities.Microelectronic process is the foundation of integrated circuits,and is also an important practical course for cultivating the innovative and practical abilities of integrated circuit talents.Therefore,a microelectronic process experiment based on field-effect transistor gas sensors is designed.Silicon-based electrodes are fabricated using the microelectronic process method,and the sensitive material SnO2/ZnO is synthesized via the aqueous phase method to construct the field-effect transistor gas sensors.X-ray diffraction is used to characterize the sensitive layer material,and the gas sensing performance of the sensors is further tested.This experiment encompasses material synthesis and characterization,microelectronic process,device fabrication and gas sensing performance testing.It is involved in materials science,microelectronics and integrated circuits,and incorporates research content into experiment teaching.This approach can help stimulate students'interest in scientific research and further cultivate their innovative and practical capabilities.关键词
微电子工艺实验/场效应管型/气敏传感器/气敏性能Key words
microelectronic process experiment/field-effect transistor/gas sensor/gas sensing performance分类
信息技术与安全科学引用本文复制引用
王海珍,冯德海,李德慧..基于场效应管型气敏传感器的微电子工艺实验设计[J].实验科学与技术,2025,23(5):32-39,8.基金项目
国家自然科学基金面上项目(62074064) （62074064）
华中科技大学实验技术研究项目面上项目(校技改2023-16,2025-2-38). （校技改2023-16,2025-2-38）
