液压与气动2025，Vol.49Issue(9)：87-93,7.DOI:10.11832/j.issn.1000-4858.2025.09.010
基于真空蝶阀的压力控制系统研究
Research on Pressure Control System Based on Vacuum Butterfly Valve
摘要
Abstract
Insufficient control precision is caused by strong nonlinearity in vacuum butterfly valve pressure control systems.A dual-mode switching strategy fusing Active Disturbance Rejection Control(ADRC)and PID control is proposed.The controller utilizes an extended state observer to uniformly estimate and compensate for aggregated disturbances including gas temperature drift,sealing friction,and gas source fluctuations.A pressure error threshold triggering mechanism is designed to activate ADRC exclusively during dynamic processes for rapid overshoot suppression,while automatically switching to lightweight PID control during steady-state operation to maintain precision.Compared with conventional PID control,settling time of proposed method is significantly shortened and overshoot substantially reduced.Compared with single ADRC control,steady-state error is effectively minimized.Under flow disturbances,pressure recovery time is 67％faster than that of PID control,with a steady-state error below 25 Pa.This approach significantly enhances system response speed,precision,and robustness,fully leveraging the cost advantage of butterfly valves.And it provides a high-performance,low-cost vacuum pressure control solution for semiconductor,aerospace,and related fields.关键词
真空蝶阀/压力控制/自抗扰控制/能耗Key words
vacuum butterfly valve/pressure control/active disturbance rejection control/energy consumption分类
机械制造引用本文复制引用
赵梦格,托乎提努尔,胡强,罗磊..基于真空蝶阀的压力控制系统研究[J].液压与气动,2025,49(9):87-93,7.基金项目
广东省重点研发计划(X200301DA200) （X200301DA200）
