电子器件2025，Vol.48Issue(4)：721-727,7.DOI:10.3969/j.issn.1005-9490.2025.04.001
基于电热驱动的MEMS位移驱动结构的设计、制备与表征
Design,Fabrication and Characterization of MEMS Displacement Actuation Structure Based on Electrothermal Actuation
摘要
Abstract
To meet the large displacement drive demand of MEMS system,the electrothermal V-shaped beam structure is used as the ini-tial displacement drive structure,by designing the displacement amplification structure,two kinds of MEMS displacement drive structures based on electrothermal drive are proposed,which are rhombic beam structure and rhombic beam cascade structure.The me-chanical properties of the displacement drive structure are studied by considering the aspects of theoretical model,optimization design and experimental verification,and the variation law of the output displacement of the displacement drive structure is revealed.The meas-ured results show that when the driving current reaches 1.8 A,the maximum output displacement of the diamond beam structure is about 16.1 μm,and the displacement amplification ratio is about 7.8.The maximum output displacement of the diamond beam cascade struc-ture is about 17.7 μm,and the displacement amplification ratio is about 9.0.The measured law is consistent with the simulation results,which verifies the correctness and effectiveness of the displacement-driven structure.关键词
MEMS/电热驱动/位移放大/力学特性Key words
MEMS/electrothermal drive/displacement amplification/mechanical properties分类
信息技术与安全科学引用本文复制引用
许少杰,包明明,袁翌庭,何静,黄苏畅,刘赛赛,韩磊..基于电热驱动的MEMS位移驱动结构的设计、制备与表征[J].电子器件,2025,48(4):721-727,7.基金项目
国家级大学生创新创业训练计划项目(202210286049Z) （202210286049Z）
国家自然科学基金项目(62174027) （62174027）
