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高纯有机试剂国内外标准比较分析

史泽远 张军华 曹可慰 吴怡然 赵俊莎

标准科学Issue(z1):161-165,5.
标准科学Issue(z1):161-165,5.

高纯有机试剂国内外标准比较分析

Comparative Analysis of Domestic and International Standards for High Purity Organic Reagents

史泽远 1张军华 1曹可慰 1吴怡然 1赵俊莎1

作者信息

  • 1. 中国电子技术标准化研究院
  • 折叠

摘要

Abstract

High purity organic reagents,belonging to the category of high purity reagents in electronic chemicals,are one of the raw materials for compounding functional electronic chemicals,which are widely used in various processes in the semiconductor industry such as integrated circuits and display.With the continuous iteration of the integrated circuit process,the requirements for high purity organic reagents have been gradually increased.At present,since there are circumstances of mismatching and inapplicability between standards and the industry,it is difficult to give play to the supporting and leading role of standards.This paper starts with the development status and demand of electronic chemicals industry system,sorts out and analyzes the standards status,and puts forward the ideas and suggestions on the systematic development of high purity organic reagent standards.

关键词

电子化学品/高纯有机试剂/标准/标准体系

Key words

electronic chemicals/high purity organic reagents/standards/standards system

引用本文复制引用

史泽远,张军华,曹可慰,吴怡然,赵俊莎..高纯有机试剂国内外标准比较分析[J].标准科学,2025,(z1):161-165,5.

标准科学

1674-5698

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