液晶与显示2025，Vol.40Issue(9)：1268-1274,7.DOI:10.37188/CJLCD.2025-0113
接近式步进全息干涉拼接曝光实现的大口径液晶偏振光栅制备
Fabrication of large-aperture liquid crystal polarization gratings by proximity stepper holographic interference splicing exposure
摘要
Abstract
Large-aperture liquid crystal polarization gratings(LCPGs)hold broad potential applications in beam steering modules due to their advantages of high efficiency and inertia-free operation.However,limited by the aperture of optical components in polarization holographic interference exposure systems,it is challenging to fabricate LCPGs with apertures exceeding 2 in(1 in=2.54 cm)through single exposure.This paper proposes a proximity stepper holographic interference splicing exposure method.By employing a photomask placed in close proximity to the exposure substrate,precise control of single-exposure area positioning is achieved combined with a high-precision displacement stage.Stepper splicing exposure of a 150 mm aperture LCPG is realized.The fabricated grating exhibits a splicing seam of only 26.4 μm and achieves a diffraction efficiency of 96.86%.This paper provides a new idea for the efficient deflection of large-aperture beams.关键词
液晶偏振光栅/全息干涉曝光/光配向/液晶聚合物Key words
liquid crystal polarization gratings/holographic interference exposure/photoalignment/liquid crystal polymer分类
数理科学引用本文复制引用
王晨,房启鹏,江飞宇,廖铖凯,孙秀辉,胡超,尹韶云..接近式步进全息干涉拼接曝光实现的大口径液晶偏振光栅制备[J].液晶与显示,2025,40(9):1268-1274,7.基金项目
国家自然科学基金面上项目(No.62175239) （No.62175239）
国家重点研发计划(No.2024YFF0726302) （No.2024YFF0726302）
重庆市北碚区科技人才与自主创新专项(No.2024-17). Supported by National Natural Science Foundation of China(No.62175239),National Key Research and Development Program of China(No.2024YFF0726302) （No.2024-17）
Chongqing Beibei District Science and Technology Bureau(No.2024-17) （No.2024-17）
