发光学报2025，Vol.46Issue(9)：1548-1563,16.DOI:10.37188/CJL.20250136
氧化镓X射线探测器
Gallium Oxide X-ray Detectors
摘要
Abstract
Gallium oxide(Ga2O3)has the advantages of high absorption efficiency for low-energy X-rays,high operating electric field,low dark current and high physicochemical stability,and is one of the important candi-date materials for direct-conversion X-ray detectors.This paper reviews the progress of X-ray detection charac-teristics of Ga2O3 and its device research from the perspectives of material,device structure,photoelectric con-version mechanism,and device applications.At present,the X-ray detectors using amorphous Ga2O3 thin films,polycrystalline(including microcrystalline and nanocrystalline)Ga2O3 thin films,highly oriented epitaxi-al single-crystal Ga2O3 thin films,single-crystal Ga2O3 bulks,and single-crystal Ga2O3 microwires have been fabricated and their detection performances have been studied.The device structures employed include metal-semiconductor-metal(MSM),Schottky junctions,heterojunctions,and vacuum structures.Various photoelec-tric conversion mechanisms,such as photoconductive gain,avalanche gain,and electron bombardment induced photoconductivity effect,have been proposed.In terms of device applications,the applications of Ga2O3 X-ray detectors in X-ray dosimeters,X-ray imaging,and wearable X-ray sensors have been displayed.Based on the above research progress,this paper further looks forward to the future development direction of Ga2O3 based X-ray detectors.关键词
氧化镓/X射线探测器/结晶性/薄膜/光电转换机制Key words
gallium oxide/X-ray detectors/crystallinity/thin film/photoelectric conversion mechanism分类
能源科技引用本文复制引用
张志鹏,陈军..氧化镓X射线探测器[J].发光学报,2025,46(9):1548-1563,16.基金项目
广东省重点领域研发计划项目(2023B0101200013)Supported by Key-Area Research and Development Program of Guangdong Province(2023B0101200013) （2023B0101200013）
