光学精密工程2025，Vol.33Issue(15)：2390-2401,12.DOI:10.37188/OPE.20253315.2390
相位调控双向剪切散斑干涉表面变形测量
Measurement of surface deformation using phase-manipulated dual-directional shearography
摘要
Abstract
To address the issue of the directional sensitivity of conventional shearography,a phase manipu-lating bidirectional shearography technique is proposed.This technique regards imaging,shearing,and phase-shifting as the phase transformation of the object wave.First,two Fresnel diffraction lenses are used to generate two laterally displaced images,forming shearograms.Then,by dynamically loading the dual-lens phase masks with different phase baselines on the liquid crystal spatial light modulator,phase-shifted shearograms are generated,and the temporal phase-shifting method is adopted for phase retrieval.The results indicate:the phase manipulating bidirectional shearography can adjust the shearing direction and amount,and introduce controllable temporal phase shifts.When using conventional shearography to reconstruct the deformation phase,the error in the non-shearing direction is 3.5-4.6 times that in the shear-ing direction.While using bidirectional shearography to reconstruct the deformation phase,the error levels in both shearing directions are similar and the error deviation is 8%.The phase manipulating bidirectional shearography technique has the characteristics of simple structure and high integration,providing an optical interferometry solution with single-wavelength,single-polarization,single-camera,single-aperture for high-precision deformation measurement.关键词
干涉测量/剪切干涉/相位调控/时间相移/表面变形测量Key words
interferometry/shearography/phase manipulating/temporal phase shift/surface deforma-tion measurement分类
信息技术与安全科学引用本文复制引用
齐司源,方未东,刘奕隆,常青,高帅,汪盛佳..相位调控双向剪切散斑干涉表面变形测量[J].光学精密工程,2025,33(15):2390-2401,12.基金项目
国家自然科学基金资助项目(No.62305082) （No.62305082）
黑龙江省自然科学基金优秀青年项目(No.YQ2022A003) （No.YQ2022A003）
