西安工程大学学报2025，Vol.39Issue(5)：1-7,7.DOI:10.13338/j.issn.1674-649x.2025.05.001
(CrFeCoNiCu)Nx薄膜的溅射及其耐腐蚀性
Sputtering and corrosion resistance of(CrFeCoNiCu)Nx films
摘要
Abstract
To investigate the effect of nitrogen flow rate on the microstructure and corrosion re-sistance of CrFeCoNiCu high-entropy alloy films,(CrFeCoNiCu)Nx films were prepared using reactive direct current magnetron sputtering.The phase structure,microstructure,and corrosion resistance of the films were analyzed using X-ray diffraction(XRD),scanning electron microscopy(SEM),atomic force microscopy(AFM),energy dispersive spectroscopy(EDS),and electro-chemical experiments.The results show that the films prepared under different nitrogen flow rates exhibit dense structures,a simple FCC structure,and preferred orientation of(111).The hardness of the films increases with rising nitrogen flow rate,reaching 322.1 HV at a flow rate of 20 sccm.As the nitrogen flow rate increases,the corrosion resistance of the films first improves and then declines.At a nitrogen flow rate of 10 sccm,the self-corrosion potential is higher at-724 mV,and the self-corrosion current density is lower at 3.77 μA·cm-2,the smooth surface and fewer defects of the films effectively hinder corrosion reactions.关键词
(CrFeCoNiCu)Nx薄膜/磁控溅射/微观结构/耐腐蚀性能Key words
(CrFeCoNiCu)Nx films/magnetron sputtering/microstructure/corrosion resistance分类
矿业与冶金引用本文复制引用
王彦龙,何潘宁,唐中淋,李文龙,张旭东..(CrFeCoNiCu)Nx薄膜的溅射及其耐腐蚀性[J].西安工程大学学报,2025,39(5):1-7,7.基金项目
陕西省自然科学基础研究计划(2023-JC-YB-476) （2023-JC-YB-476）
