测试科学与仪器2025，Vol.16Issue(3)：323-333,11.DOI:10.62756/jmsi.1674-8042.2025031
MEMS谐振器中用于隔振的折叠螺旋梁声子晶体板设计
Design of phononic crystal plate with folded helical beam for vibration isolation in MEMS resonators
摘要
Abstract
Enhancing the vibration resistance of micro-electro-mechanical systems(MEMS)resonators in complex environments is a critical issue that urgently needs to be addressed.This paper presents a chip-scale locally resonant phononic crystal(LRPnC)plate based on a folded helical beam structure.Through finite element simulation and theoretical analysis,the bandgap characteristics and vibration suppression mechanisms of this structure were thoroughly investigated.The results show that the structure exhibits a complete bandgap in the frequency range of 9.867-14.605 kHz,and the bandgap can be effectively tuned by adjusting the structural parameters.Based on this,the influence of the number of unit cell layers on the vibration reduction performance was further studied,and a finite periodic LRPnC plate was constructed.Numerical studies have shown that the LRPnC plate can achieve more than-30 dB of vibration attenuation within the bandgap and effectively suppress y-direction coupling vibrations caused by x-direction propagating waves.In addition,its chip-scale size and planar structure design provide new ideas and methods for the engineering application of phononic crystal technology in the field of MEMS vibration isolation.关键词
微机电系统谐振器/振动隔离/局域共振型声子晶体/芯片级声学超材料/有限元仿真Key words
micro-electro-mechanical systems(MEMS)resonators/vibration isolation/locally resonant phononic crystals(LRPnC)/chip-level acoustic metamaterials/finite element simulation引用本文复制引用
李思怡,徐李疆,姜波..MEMS谐振器中用于隔振的折叠螺旋梁声子晶体板设计[J].测试科学与仪器,2025,16(3):323-333,11.基金项目
This work was supported by National Natural Science Foundation of China(No.62271262). （No.62271262）
