化工进展2025，Vol.44Issue(9)：5292-5300,9.DOI:10.16085/j.issn.1000-6613.2024-1256
键合二苯甲酮的蓖麻油基UV减黏胶的制备及性能
Preparation and properties of castor oil-based UV adhesion-reducing adhesive bonded with dibenenone photoinitiator
摘要
Abstract
With the increasing demand for decreasing the size and introducing full-scale 3D integration in the semiconductor wafer manufacturing process,higher requirements are put forward for the residual adhesive and the adhesion-reducing performance of UV adhesion-reducing adhesive.In this paper,an acrylic copolymer(ABP-PSA)bonded with benzophenone(BP)photoinitiator was prepared by copolymerization of 4-acryloyloxy benzophenone(ABP)with conventional acrylate monomers.The results showed that the introduction of ABP increased the molecular weight of acrylate copolymer and reduced its glass transition temperature.Thus,its cohesion strength and peeling force increased firstly and then decreased with the increase of ABP content.When the weight content of ABP was 3%,the normal peel strength of ABP-PSA was the highest(9.9N/25mm),which was significantly higher than that of the ABP-free copolymer(6.2N/25mm).During UV irradiation,the BP group seized the tertiary hydrocarbon atom in the polymer side chain,which made the polymer chain self-crosslinked and the peeling strength was reduced to 3.8N/25mm.The adhesion-reducing rate was over 60%.A new UV adhesion-reducing adhesive was prepared by ABP-PSA and castor oil-based polyurethane acrylate prepolymer(CO-PUB-PETA)with heat/light dual curing functions.With the help of the network structure formed by the thermal curing reaction of the NCO group in CO-PUB-PETA and the hydroxyl group in ABP-PSA,the 180° peel strength of the UV adhesion-reducing adhesive before UV curing exceeded 25N/25mm and the photopolymerization function was endowed to the acrylic copolymer adhesive.After UV irradiation,the BP groups bonded to the copolymer chains initiated the photopolymerization of the acrylic copolymer and the reactive diluent,and self-crosslinking for polymer chains occurred,forming a dense fully cross-linked structured adhesive film.The 180° peel strength was reduced to 0.12N/25mm and the adhesion-reducing rate was over 99.5%.Furthermore,the amounts of residual adhesives were significantly reduced.关键词
紫外光减黏胶/蓖麻油基聚氨酯丙烯酸酯/二苯甲酮/自交联/残胶Key words
UV adhesion-reducing adhesive/castor oil-based polyurethane acrylate/benzophenone/self-crosslinking/residual adhesives分类
化学化工引用本文复制引用
崔宗晖,申洪刚,韦敬旗,伊松龄,孙玉娟,刘少杰,赵松..键合二苯甲酮的蓖麻油基UV减黏胶的制备及性能[J].化工进展,2025,44(9):5292-5300,9.基金项目
国家自然科学基金(22178085) （22178085）
中央引导地方科技发展资金项目(236Z4309G). （236Z4309G）
