中国光学（中英文）2025，Vol.18Issue(5)：1255-1265,11.DOI:10.37188/CO.EN-2025-0021
具有温度补偿的金属膜片式光纤法珀压力传感器
Metal-sensitive diaphragm fiber optic Fabry-Perot pressure sensor with temperature compensation
摘要
Abstract
A metal-sensitive diaphragm fiber optic pressure sensor with temperature compensation is de-veloped for pressure monitoring in high-temperature environments,such as engine fuel systems,oil and gas wells,and aviation hydraulic systems.The sensor combines a metal-sensitive diaphragm and a sapphire wafer to form a temperature-pressure dual Fabry-Perot(FP)interference cavity.A cross-correlation signal demodu-lation algorithm and a temperature decoupling method are utilized to reduce the influence of temperature crosstalk on pressure measurement.Experimental results show that the maximum nonlinear error of the sensor pressure measurement is 0.75％full scale(FS)and 0.99％FS at room temperature and 300 ℃,re-spectively,in a pressure range of 0-10 MPa and 0-1.5 MPa.The sensor's pressure measurement accuracy is 1.7％FS when using the temperature decoupling method.The sensor exhibits good static pressure character-istics,stability,and reliability,providing an effective solution for high-temperature pressure monitoring ap-plications.关键词
高温压力传感器/双法珀干涉腔/温度补偿/互相关算法Key words
high-temperature pressure sensor/dual Fabry-Perot interference cavity/temperature compensa-tion/cross-correlation algorithm分类
信息技术与安全科学引用本文复制引用
王昊星,刘佳,王海洋,王军,李元浩,殷建雄,万顺,戴云腾,贾平岗..具有温度补偿的金属膜片式光纤法珀压力传感器[J].中国光学（中英文）,2025,18(5):1255-1265,11.基金项目
国家自然科学基金(No.51935011) （No.51935011）
山西省科技创新团队专项资金(No.202204051001016)Supported by National Natural Science Foundation of China(No.51935011) （No.202204051001016）
The special fund for Science and Technology Innovation Teams of Shanxi Province(No.202204051001016) （No.202204051001016）
