中国光学（中英文）2025，Vol.18Issue(5)：1016-1026,11.DOI:10.37188/CO.2025-0033
利用级联超构表面同时测量径向角位移和纵向线位移
Simultaneous measurement of radial angular displacement and longitudinal linear displacement with cascade metasurfaces
摘要
Abstract
To solve the problem of existing metasurface displacement measurement techniques unable to measure multiple physical quantities simultaneously,this paper proposes a metasurface cascade structure that can measure radial angular displacement and longitudinal linear displacement simultaneously.First,the working principle of displacement measurement is described according to the joint phase modulation of cir-cular polarized light by a cascade metasurface.Secondly,the displacement information carried by the phase delay is analyzed using the Jones transport matrix,and the angular and linear displacements are mathematic-ally characterized.Then,the design objective is used as a constraint to optimize unit structure parameters and create metasurface models.Finally,the finite-difference time-domain method is used to simulate the metasur-face structures,validate the method's feasibility,and evaluate the device's measurement performance.The results show that the angular displacement sensitivity is 0.971 6 with a theoretical resolution of 34.27 μrad,and the linear displacement sensitivity is 0.0041 with a theoretical resolution of 8.12 nm at the working wavelength of 633 nm.The measurement freedom of metasurface displacement measurement technology is improved by this method.It is hoped to be further expanded to six dimensions so that the measured target's entire attitude can be determined.关键词
超构表面/角位移/线位移/位移测量/多物理量Key words
metasurface/angular displacement/linear displacement/displacement measurement/multiple physical quantities分类
信息技术与安全科学引用本文复制引用
张振宇,张伟,刘睿,张婧英,李文昊..利用级联超构表面同时测量径向角位移和纵向线位移[J].中国光学（中英文）,2025,18(5):1016-1026,11.基金项目
中国科学院稳定支持基础研究领域青年团队项目(No.YSBR-103) （No.YSBR-103）
中国科学院青年创新促进会(No.2021220) （No.2021220）
吉林省与中国科学院科技合作高技术产业化专项(No.2024SYHZ0018) （No.2024SYHZ0018）
吉林省科技发展计划科技条件与平台建设计划(No.20220505001ZP)Supported by CAS Project for Young Scientists in Basic Research(No.YSBR-103) （No.20220505001ZP）
Chinese Academy of Sci-ences Youth Innovation Promotion Association(No.2021220) （No.2021220）
Jilin Province and CAS Science and Techno-logy Cooperation in High-Tech Industrialization of Special Projects(No.2024SYHZ0018) （No.2024SYHZ0018）
Jilin Provincial Sci-ence and Technology Development Program of Science and Technology Conditions and Platform Construction Program(No.20220505001ZP) （No.20220505001ZP）
