中国光学（中英文）2025，Vol.18Issue(5)：1044-1054,11.DOI:10.37188/CO.2024-0144
生物荧光系统中多通道负滤光膜的研制
Development of multi-channel negative filter film in bioluminescence system
摘要
Abstract
With the rapid development of bioluminescence technology,the demand for high-precision signal transmission has increased significantly.As the filter film is the core component of the system,the spectral characteristic of the filter film directly affects the accuracy of signal transmission.In this study,Nb2O5 and SiO2 were selected as high and low refractive index materials,respectively.A multi-channel negative filter was optimized using the Gaussian apodization function and Optilayer software.The filter film was deposited on a D263T substrate using an inductively coupled magnetron sputtering technique.The effect of thickness control errors on spectral shift and passband transmittance was addressed through inverse film sensitivity analysis.The effect of process parameters on film roughness was investigated,and it was found that adjust-ing the inductively coupled plasma(ICP)power could effectively improve film roughness.When the de-veloped multi-channel negative filter was tested at a 45° angle of incidence,the reflectance half-bandwidths of the center wavelengths of 576 nm,639 nm,and 690 nm were 5 nm,6 nm and 7 nm,respectively,with an average reflectance of about 98％.The average transmittance in the transmission ranges of 545-562 nm,597-624 nm,655-675 nm,and 708-755 nm was 92％.The multi-channel negative filter successfully passed both the environmental resistance test and the spectral stability test,thus meeting the application require-ments of the multi-channel negative filter in the bioluminescence system.关键词
生物荧光系统/多通道负滤光膜/膜厚误差/粗糙度Key words
bioluminescence system/multi-channel negative filter film/error of film thickness/roughness分类
数理科学引用本文复制引用
齐浩迪,付秀华,潘永刚,石澎,王奔,林兆文,董所涛,赵宝亮,李爽..生物荧光系统中多通道负滤光膜的研制[J].中国光学（中英文）,2025,18(5):1044-1054,11.基金项目
中山市引进创新新团队项目(No.CXTD2023008) （No.CXTD2023008）
中山市社会公益科技研究项目(No.2022B2005)Supported by Introducing Innovative New Team Projects in Zhongshan City(No.CXTD2023008) （No.2022B2005）
Social Commonweal Science and Technology Research Program in Zhongshan city(No.2022B2005) （No.2022B2005）
